Abstract: Provided is a gas diffusion electrode equipped ion exchange membrane electrolyzer including an anode, an ion exchange membrane, and a cathode chamber in which a gas diffusion electrode is disposed, wherein the ion exchange membrane and a cathode chamber inner space in which the gas diffusion electrode is disposed are separated by a liquid retaining member, the outer periphery of the liquid retaining member is held in a void formed in a gasket or a cathode chamber frame constituting the cathode chamber, or the outer periphery and the end face of the outer periphery of the liquid retaining member are sealed, or the outer periphery of the liquid retaining member is joined to and integrated with the gasket.

Abstract: A cleaning method includes: producing an oxidizing solution by electrolysis of sulfuric acid; and cleaning a workpiece with the oxidizing solution. The oxidizing solution is heated by heat of mixing to clean the workpiece. A method for manufacturing an electronic device includes: producing a workpiece; producing an oxidizing solution by electrolysis of sulfuric acid; and cleaning the workpiece with the oxidizing solution. The oxidizing solution is heated by heat of mixing to clean the workpiece.

Abstract: The present invention relates to a conductive diamond electrode, comprising a substrate having a plurality of convex and concave part disposed over the entire surface of the conductive diamond electrode, and a diamond film coated on the surface of said substrate, wherein the width of each convex part of said convex and concave part is in a range from 0.2 mm to 1 mm. The present invention can provide a conductive diamond electrode, applying a thin film of conductive diamond and a thick substrate, being less expensive than a self-supported type conductive diamond electrode and also having mechanical strength enough to be used in the zero-gap electrolysis, functioning stably for a long time with smooth water supply or gas liberation, and an ozone generator using the conductive diamond electrode.

Abstract: An apparatus for electrolyzing sulfuric acid, the apparatus comprising an electrolytic cell comprising a cathode chamber having a cathode and an anode chamber having an anode, the cathode chamber and the anode chamber being separated by a diaphragm, a sulfuric acid tank configured to store the sulfuric acid, a supply pipe connecting the sulfuric acid tank to an inlet port of the anode chamber, a connection pipe connecting an outlet port of the cathode chamber to the inlet port of the anode chamber, a first supply pump provided on the supply pipe and configured to supply the sulfuric acid from the sulfuric acid tank to the cathode chamber through the supply pipe, and a drain pipe connected to an outlet port of the anode chamber and configured to supply to a solution tank a solution containing an oxidizing agent generated by electrolysis in the anode chamber.

Abstract: Sulfuric acid electrolysis process wherein; a temperature of electrolyte containing sulfuric acid to be supplied to an anode compartment and a cathode compartment is controlled to 30 degree Celsius or more; a flow rate F1 (L/min.) of the electrolyte containing sulfuric acid to be supplied to said anode compartment is controlled to 1.5 times or more (F1/Fa?1.5) a flow rate Fa (L/min.) of gas formed on an anode side as calculated from Equation (1) shown below and a flow rate F2(L/min.) of said electrolyte containing sulfuric acid to be supplied to said cathode compartment is controlled to 1.5 times or more (F2/Fc?1.5) a flow rate Fe (L/min.) of gas formed on a cathode side as calculated from Equation (2) shown below. Fa=(I×S×R×T)/(4×Faraday constant)??Equation (1) Fe=(I×S×R×T)/(2×Faraday constant)??Equation (2) I: Electrolytic current (A) S: Time: 60 second (Fixed) R: Gas constant (0.082 1·atm/K/mol) K: Absolute temperature (273.

Abstract: [Problems] The liquid pressure of an anode chamber in a two-chamber ion exchange membrane electrolytic cell using a gas diffusion electrode are different among one another depending on depths so that the liquid pressures are applied on an anode or an ion exchange membrane, thereby introducing damage or deformation of the elements. [Means for Solving] A cushion material 10 is accommodated between a cathode gas chamber back plate 9 and a gas diffusion electrode 7 of an ion exchange membrane electrolytic cell 1 such that a repulsive force of the cushion material at the bottom part of the cathode gas chamber is larger than that at the top part. The excessive pressure applied to an ion exchange membrane is suppressed to prevent the generation of scratches or the like by decreasing the repulsive force of the cushion material toward the top in accordance with a differential pressure between an anode chamber pressure and a cathode gas chamber pressure.

Abstract: The cleaning method by electrolytic sulfuric acid and the manufacturing method of semiconductor device comprising: the process in which the first sulfuric acid solution is supplied from outside to the sulfuric acid electrolytic cell to form the first electrolytic sulfuric acid containing oxidizing agent in the sulfuric acid electrolytic cell; the process in which the second sulfuric acid solution, which is higher in concentration than said the first sulfuric acid solution previously supplied, is supplied from outside to said sulfuric acid electrolytic cell; said the second sulfuric acid solution and the first electrolytic sulfuric acid are mixed in said sulfuric acid electrolytic cell; and electrolysis is performed to form the cleaning solution comprising the second electrolytic sulfuric acid containing sulfuric acid and oxidation agent in said sulfuric acid electrolytic cell and the process in which cleaning treatment is performed for the cleaning object with said cleaning solution.

Abstract: In a sulfuric acid electrolytic cell to electrolyze sulfuric acid supplied to an anode compartment and a cathode compartment comprising a diaphragm, said anode compartment and said cathode compartment separated by said diaphragm, a cathode provided in said cathode compartment and a conductive diamond anode provided in said anode compartment, as said conductive diamond anode, a conductive diamond film is formed on the surface of said conductive substrate, the rear face of said conductive substrate is pasted, with conductive paste, on an current collector comprising a rigid body with size equal to, or larger than, said conductive substrate, an anode compartment frame constituting said anode compartment is contacted via gasket with the periphery on the side of the conductive diamond film of said diamond anode, said diaphragm is contacted with the front face of said anode compartment, further, with the front face of said diaphragm, the cathode compartment frame constituting said cathode compartment, a gasket, and

Abstract: An electrode for hydrogen generation can maintain a low hydrogen overvoltage for a long period of time even when electrolysis is conducted there not only with a low current density but also with a high current density. The electrode for hydrogen generation has a coating layer formed on a conductive base member by applying a material not containing any chlorine atom prepared by dissolving lanthanum carboxylate in a nitric acid solution of ruthenium nitrate and thermally decomposing the material in an oxygen-containing atmosphere.

Abstract: A three-dimensional electrode with higher strength and higher toughness is provided. The three-dimensional electrode is fabricated by bending a plurality of snicks which are formed in a plate-like electrode substrate toward the same direction. The stabilization of the positional relation among the elements generated by the three-dimensional electrode neither mechanically damages the membrane nor causes the insufficient current supply. The three-dimensional electrode is preferably used for brine electrolysis and white liquor electrolysis.

Abstract: An ion exchange membrane electrolyzer is provided, which is characterized in that a current is passed through at least one electrode in contact with a plate spring member formed at a portion of an electrode retainer member parallel with a flat plate form of electrode chamber partition, wherein said electrode retainer member is joined at a belt junction to the flat plate form of electrode chamber partition with a space between them, said electrode is provided with a floating mount means at a portion thereof other than a portion of contact with the plate spring member, and said floating mount means is provided with an engaging portion that is engaged with a fixed engaging member to enable said electrode to move in a perpendicular direction to an electrode surface and in a range of displacement of said plate spring member.

Abstract: The present invention relates to a conductive diamond electrode, comprising a substrate having a plurality of convex and concave part disposed over the entire surface of the conductive diamond electrode, and a diamond film coated on the surface of said substrate, wherein the width of each convex part of said convex and concave part is in a range from 0.2 mm to 1 mm. The present invention can provide a conductive diamond electrode, applying a thin film of conductive diamond and a thick substrate, being less expensive than a self-supported type conductive diamond electrode and also having mechanical strength enough to be used in the zero-gap electrolysis, functioning stably for a long time with smooth water supply or gas liberation, and an ozone generator using the conductive diamond electrode.

Abstract: The invention provides an ion exchange membrane electrolytic process unlikely to undergo any current density drop even when brine having a concentration lower than usual. Electrolysis occurs while the concentration of an aqueous solution of an alkaline metal chloride in an anode chamber partitioned by a cation exchange membrane is set at 2.7 mol/l to 3.3 mol/l, and a gap is provided between the cation exchange membrane and the anode.

Abstract: There is provided an ion exchange membrane electrolyzer, wherein at least one electrode is energized by coming into contact with plate spring bodies formed on the electrode side of an electrode holding member forming a space with an electrode chamber partition bonded to a plate-like electrode chamber partition by a strip-like bonded portion, the electrode has a connected portion extending from a plane parallel to the ion exchange membrane toward the electrode holding member side in a direction perpendicular to the electrode plane, the connected portion is provided with an engaging opening extending in a direction perpendicular to the electrode plane, and the engaging opening engages with an engaging member, permitting the electrode to move in a direction perpendicular to the electrode plane within the displacement range of the plate spring bodies.

Abstract: An ion exchange membrane electrolyzer comprises electrodes at least either of which is held in contact with leaf springs formed integrally with a leaf spring holding member arranged in an electrode chamber so as to extend toward the electrode and remain electrically energized at the respective electrode touching sections thereof, each of the leaf springs having a crooked section arranged at a position separated from its connecting section connecting itself to the leaf spring holding member and adapted to be bent toward the leaf spring holding member when the electrode touching section is pressed toward the leaf spring holding member side.

Abstract: An electrode for hydrogen generation can maintain a low hydrogen overvoltage for a long period of time even when electrolysis is conducted there not only with a low current density but also with a high current density. The electrode for hydrogen generation has a coating layer formed on a conductive base member by applying a material not containing any chlorine atom prepared by dissolving lanthanum carboxylate in a nitric acid solution of ruthenium nitrate and thermally decomposing the material in an oxygen-containing atmosphere.

Abstract: A hydrogen combustion system comprising: an external cylinder 1 constituting the exterior of a double tube construction; an internal cylinder 2 formed by a porous metal plate constituting the interior of said double tube construction; hydrogen combustion catalyst 4 supported with precious metals on spherical ceramic support surface, formed in pellet state, being packed in said internal cylinder 2; an insert pipe 3 formed by porous metal plate inserted in the center of said internal cylinder 2; pre-heating heaters 5 installed between said insert pipe 3 and said internal cylinder 2 to preheat said hydrogen combustion catalyst 4 to ambient atmosphere of over catalytic reaction temperatures; a hydrogen introducing port 8 connecting to said insert pipe 3; an air introducing port 9 provided at the bottom of said external cylinder 1 in the area between said external cylinder 1 and said internal cylinder 2, wherein air for hydrogen combustion is introduced by the drift effect resulting from the differential pressure

Abstract: An ultra-pure ozone water comprising an increased amount of an organic carbon capable of suppressing the reduction of the half-life period of ozone; and a method for producing the ultra-pure ozone water which comprises adding an organic solvent containing the above organic carbon to an ultra-pure ozone water containing a trace amount of the organic carbon. The above ultra-pure ozone water exhibits an increased half-life period of ozone, and thus, when used in cleaning a semiconductor substrate, allows the cleaning with an ozone water having an enhanced content of ozone, which results in exhibiting an enhanced cleaning capability and cleaning efficiency for an organic impurities, metallic impurities and the like adhered to the substrate, due to enhanced oxidizing action of ozone.

Abstract: Sulfuric acid electrolysis process wherein; a temperature of electrolyte containing sulfuric acid to be supplied to an anode compartment and a cathode compartment is controlled to 30 degree Celsius or more; a flow rate F1 (L/min.) of the electrolyte containing sulfuric acid to be supplied to said anode compartment is controlled to 1.5 times or more (F1/Fa?1.5) a flow rate Fa (L/min.) of gas formed on an anode side as calculated from Equation (1) shown below and a flow rate F2(L/min.) of said electrolyte containing sulfuric acid to be supplied to said cathode compartment is controlled to 1.5 times or more (F2/Fc?1.5) a flow rate Fe (L/min.) of gas formed on a cathode side as calculated from Equation (2) shown below. Fa=(I×S×R×T)/(4×Faraday constant) ??Equation (I) Fe=(I×S×R×T)/(2×Faraday constant) ??Equation (2) I: Electrolytic current (A) S: Time: 60 second (Fixed) R: Gas constant (0.082 1·atm/K/mol) K: Absolute temperature (273.

Abstract: In a sulfuric acid electrolytic cell to electrolyze sulfuric acid supplied to an anode compartment and a cathode compartment comprising a diaphragm, said anode compartment and said cathode compartment separated by said diaphragm, a cathode provided in said cathode compartment and a conductive diamond anode provided in said anode compartment, as said conductive diamond anode, a conductive diamond film is formed on the surface of said conductive substrate, the rear face of said conductive substrate is pasted, with conductive paste, on an current collector comprising a rigid body with size equal to, or larger than, said conductive substrate, an anode compartment frame constituting said anode compartment is contacted via gasket with the periphery on the side of the conductive diamond film of said diamond anode, said diaphragm is contacted with the front face of said anode compartment, further, with the front face of said diaphragm, the cathode compartment frame constituting said cathode compartment, a gasket, and