Patents Assigned to Clariant Finance Lmited
  • Photoresist composition containing a novel polymer
    Patent number: 6103443
    Abstract: A photoresist composition comprising a film forming resin obtained by condensing a phenol derivative and a substituted diphenyl ether, a photoactive compound, and a solvent. The photoresist composition may also contain an alkali-soluble, film-forming resin, such as a novolak resin. The photoresist of the instant invention improves the photospeed, resolution and thermal stability of the photoresist images.
    Type: Grant
    Filed: November 21, 1997
    Date of Patent: August 15, 2000
    Assignee: Clariant Finance Lmited
    Inventors: Stanley F. Wanat, Kathryn H. Jensen, Ping-Hung Lu, Douglas McKenzie