Abstract: Provided is a method of manufacturing a multi-frequency surface acoustic wave (SAW) device on a common piezoelectric substrate. The method features varying the resonant frequency of waveguide elements of the SAW device using a single etch step. The etch step removes a sub-portion of multiple layers of conductive film disposed on the substrate.
Type:
Application
Filed:
November 5, 2002
Publication date:
May 6, 2004
Applicant:
CLARISAY, INC.
Inventors:
David M. Lee, Paul Lindars, Christopher Ellis Jones, James E. Flowers, Martin P. Goetz
Abstract: A surface acoustic wave (SAW) circuit package and a method of fabricating the package. In one embodiment, the package includes: (1) a substantially planar piezoelectric substrate, (2) SAW circuit conductors located over the substrate and (3) a passivation layer located over the SAW circuit conductors, the substrate and the passivation layer cooperating to form a hermetic seal to isolate the SAW circuit conductors from an environment proximate the package.
Abstract: A method of manufacturing a hermetic package. In one embodiment, the method includes: (1) forming a plurality of contact-sensitive electronic devices on a device substrate, each of the plurality of devices having an active surface, (2) providing a mounting substrate, (3) forming a grid of dam material between the device substrate and the mounting substrate that is pitched as a function of lateral dimensions of the plurality of devices, (4) bringing the device substrate and the mounting substrate together until the active surface of each of the plurality of devices is proximate, but spaced apart from, the mounting substrate, the mounting substrate and the dam material cooperating to form packages for the plurality of devices and (5) dicing the device substrate to separate the packages.
Type:
Grant
Filed:
November 29, 2001
Date of Patent:
November 18, 2003
Assignee:
Clarisay, Inc.
Inventors:
Martin P. Goetz, Merrill A. Hatcher, Christopher E. Jones
Abstract: A hermetic package for an electronic device, such as a surface acoustic wave (SAW) device and a method of manufacturing the same. In one embodiment, the package includes: (1) a device substrate having: (a) an active region containing an electrically conductive pattern that constitutes at least a portion of the device, (b) a contact region surrounding the active region and containing bond pads that are electrically coupled to the pattern and (c) a bonding region surrounding the active region, (2) a non-porous mounting substrate having a bonding region thereon and a footprint smaller than a footprint of the device substrate and (3) a bonding agent, located between the bonding region of the device substrate and the bonding region of the mounting substrate, that bonds the device substrate to the mounting substrate to enclose the active region proximate a void between the device substrate and the mounting substrate, the contact region remaining exposed.
Type:
Grant
Filed:
April 23, 2002
Date of Patent:
October 28, 2003
Assignee:
Clarisay, Inc.
Inventors:
Martin P. Goetz, Merrill A. Hatcher, Christopher E. Jones
Abstract: An element of a SAW filter network, a method of filtering a signal and a SAW filter network incorporating the element or the method. In one embodiment, the element includes: (1) a SAW resonator having a nominal usable bandwidth and (2) an extrinsic capacitor coupled in parallel with the SAW resonator, the extrinsic capacitor interacting with the SAW resonator to cause an anti-resonance frequency of the element to move toward a resonance frequency thereof and thereby decrease an overall operating bandwidth of the element.
Abstract: A surface acoustic wave (SAW) device, a method of manufacturing the same and a SAW filter having at least one SAW device. In one embodiment, the SAW device includes: (1) a piezoelectric substrate, (2) a conductive layer located over the piezoelectric substrate and (3) a resistor, coupled between a portion of the conductive layer and the piezoelectric substrate, that forms a return path for static charge migrating from the piezoelectric substrate to the conductive layer.
Abstract: A hermetic package for a pyroelectric-sensitive electronic device and methods of manufacturing one or more of such packages. In one embodiment, the package includes: (1) a device substrate having: (1a) an active region containing an electrically conductive pattern that constitutes at least a portion of the device and (1b) a bonding region surrounding the active region, (2) a non-porous mounting substrate having a bonding region thereon and (3) a nonmetallic hermetic sealing adhesive, located between the bonding region of the device substrate and the bonding region of the mounting substrate, that cures at a temperature substantially below a pyroelectric sensitive temperature of the device, the active region proximate a void between the device substrate and the mounting substrate.
Type:
Grant
Filed:
November 29, 2001
Date of Patent:
January 14, 2003
Assignee:
Clarisay, Inc.
Inventors:
Martin P. Goetz, Merrill A. Hatcher, Christopher E. Jones
Abstract: Filter structures are described consisting of a plurality of individual surface acoustic wave (SAW) resonators formed of inter-digitated metallic combs on a common piezoelectric substrate. Areas of metallisation (1, 2, 3, 4) between the combs provide means to connect the filter in a circuit, e.g. in a mobile telephone unit to act as a filter with a passband in the 800 to 2200 MHz range. The individual SAW resonators differ from one another and are interconnected in ladder and/or balanced bridge arrangements.