Patents Assigned to CLEAN FACTORS CO., LTD.
  • METHOD AND VACUUM SYSTEM FOR REMOVING METALLIC BY-PRODUCTS
    Publication number: 20150252472
    Abstract: Provided is a method for removing metallic by-products. The method includes depositing a metal precursor to form a metal layer in a process chamber, plasma treating an exhaust gas containing the residual metal precursor transferred from the process chamber, treating metallic by-products generated by the plasma treatment with an oxidizing gas to produce metal oxides, and discharging the metal oxides by pumping.
    Type: Application
    Filed: October 16, 2013
    Publication date: September 10, 2015
    Applicant: CLEAN FACTORS CO., LTD.
    Inventors: Gyoung O Ko, Myung keun Noh