Patents Assigned to Clean Systems Korea Inc.
  • Scrubber for processing semiconductor waste gas
    Patent number: 7758818
    Abstract: Disclosed is a scrubber for processing semiconductor waste gas produced in a semiconductor fabricating process, wherein the scrubber burns the waste gas with a flame of a high temperature, filters and captures particles produced after the waste gas is burnt, and discharges particle-filtered waste gas to the atmosphere.
    Type: Grant
    Filed: September 1, 2006
    Date of Patent: July 20, 2010
    Assignee: Clean Systems Korea Inc.
    Inventors: Young Chan Lee, Hyung Geuk Kim, Sang Keun Lee