Patents Assigned to CMC ADVANCED R&D. CO., LTD
  • MICRO COIL, MANUFACTURING METHOD AND MANUFACTURING APPARATUS THEREOF
    Publication number: 20130136912
    Abstract: A reaction container includes a cylindrical container body, a source gas introduction pipe group and a gas discharge pipe group extended in the opposite directions from both left and right side portions of the container body, and a cylindrical substrate inserted into the container body. Source gases introduced from the source gas introduction pipe group into the container body are thermally decomposed by the reaction with a catalyst carried on the substrate at a predetermined high temperature to grow micro coils from the substrate.
    Type: Application
    Filed: August 25, 2011
    Publication date: May 30, 2013
    Applicant: CMC ADVANCED R&D. CO., LTD
    Inventor: Seiji Motojima