Patents Assigned to Co-Ordinate Technology Ltd.
  • Step and repeat apparatus
    Patent number: 4694776
    Abstract: Step and repeat apparatus used for performance operations upon a generally planar component such as a microprocessor wafer comprises a support for a workpiece, the support being attached by means of an arm to a mechanism adapted to move the support in two dimensions, the arm being pivotally secured to said mechanism at a location remote from the support and lifting means arranged to move the support about the pivot in a plane perpendicular to said two dimensions.
    Type: Grant
    Filed: June 21, 1985
    Date of Patent: September 22, 1987
    Assignee: Co-Ordinate Technology Ltd.
    Inventors: Rex H. Sandbach, Alan Poole