Abstract: A method for evaluating and/or compensating the acceleration offset in a combined accelerometer and gyroscope, wherein the evaluation or compensation is based on a quadrature signal delivered by the accelerometer.

Abstract: A method for evaluating and/or compensating the acceleration offset in a combined accelerometer and gyroscope, wherein the evaluation or compensation is based on a quadrature signal delivered by the accelerometer.

Abstract: A vibrating gyroscope comprising: a proof mass (1); a spring suspension system (5, 6, 7, 8; 9) for suspending the proof mass; an electrical drive mechanism for vibrating the proof mass along a drive axis (x); electrodes (2, 3) for building together with at least a part of the proof mass (1) a capacitance system for detecting moves of the proof mass along a sense axis (z) perpendicular to the drive axis. The gyroscope is arranged so that quadrature forces generate displacements of the proof mass without substantially displacing the neutral point (10) of the proof mass along the sense axis (z). This may be achieved by tilting the proof mass while keeping its neutral point at a constant position along the sense axis, or by applying a constant electrostatic force.

Abstract: Microelectromechanical system (MEMS) comprising: an active part (5) comprising an electromechanical device (28), at least one base (6) for fastening said microsystem on a support (8), at least one fastener (21, 21?) fastening said active part (5) to said at least one base (6) and allowing a displacement of said active part (5) relatively to said at least one base (6) along an axis (Z) more or less perpendicular to the plane of said support (8) when said microsystem is fastened onto said support (8), bumper elements (27, 27?, 37?) for limiting the amplitude of the displacements of said active part (5) relatively to said at least one base (6) along said perpendicular axis (Z). The active part (5) being capable of moving relatively to the base (6) to which it is fastened, it is isolated from any mechanical constraint that could be sustained by the base (6), in particular torsion or flexion due to it being fastened onto a support (8).

Abstract: Microelectromechanical system (MEMS) comprising: an active part (5) comprising an electromechanical device (28), at least one base (6) for fastening said microsystem on a support (8), at least one fastener (21, 21?) fastening said active part (5) to said at least one base (6) and allowing a displacement of said active part (5) relatively to said at least one base (6) along an axis (Z) more or less perpendicular to the plane of said support (8) when said microsystem is fastened onto said support (8), bumper elements (27, 27?, 37?) for limiting the amplitude of the displacements of said active part (5) relatively to said at least one base (6) along said perpendicular axis (Z). The active part (5) being capable of moving relatively to the base (6) to which it is fastened, it is isolated from any mechanical constraint that could be sustained by the base (6), in particular torsion or flexion due to it being fastened onto a support (8).