Abstract: The present invention provides a method for purifying ruthenium sources to obtain high purity ruthenium metal and form a ruthenium metal pattern on a semiconductor substrate without the need for high temperature processing or a complex series of wet processes. A gas stream including ozone (O3) is brought into contact with a ruthenium source in one or more reaction vessels to form ruthenium tetraoxide (RuO4), a compound that is a gas at the reaction conditions. The ruthenium tetraoxide, along with unreacted ozone and the remainder of the gas stream is then fed into a collection vessel where the gaseous ruthenium tetraoxide is reduced to form a ruthenium dioxide (RuO2) layer on a semiconductor substrate. The deposited ruthenium dioxide is then reduced, preferably with hydrogen, to produce highly pure ruthenium metal that may be, in turn, patterned and dry etched using ozone as an etchant gas.

Abstract: The present invention provides a method for purifying ruthenium sources to obtain high purity ruthenium metal without the need for high temperature processing, expensive reagents, complex series of wet processes, or expensive equipment. According to the present invention, a gas stream including ozone (O3) is brought into contact with a ruthenium source, such as a commercial ruthenium metal sponge, in one or more reaction vessels. The ozone reacts with the ruthenium present in the ruthenium source to form ruthenium tetraoxide (RuO4), a compound that is a gas at the reaction conditions. The ruthenium tetraoxide, along with unreacted ozone and the remainder of the gas stream is then fed into a collection vessel where a major portion of the gaseous ruthenium tetraoxide is thermally reduced to form ruthenium dioxide (RuO2) deposits within the collection vessel.

Abstract: Method and apparatus for catalytically oxidating grease, fats, oils and/or other hydrocarbons in fumes rising from a source thereof. In particular, grease and odor-laden air streams, i.e. hydrocarbon-laden air streams, emanating from a source such as a cooking grill or the like are heated to a temperature at which passage over a catalyst causes flameless oxidation of the organic material in the air stream at a temperature below combustion temperature, the organic material being converted essentially to carbon dioxide and water, with release of at least some heat energy. The oxidized and heated air stream is ducted in countercurrent relation or in identically parallel direction, to the relatively cooler hydrocarbon-laden air stream which is being ducted toward the catalyst, heat exchange from the oxidized air stream to the hydrocarbon-laden air stream thereby occurring to at least partially heat the hydrocarbon-laden air stream.

Abstract: A pressurized aerosol package contains a metal-containing catalytic mixture of the type used in catalytic heaters. The mixture could contain, for example, chloroplatinic acid, with other materials, such as aluminum oxide, dextrose and triethanolamine all dissolved and mixed in water. In use, the mixture is sprayed onto, and impregnates, expended carrier pads of catalytic heaters to revive the pads and permit continued use of the heaters. In addition, the mixture can be sprayed into the exhaust system of an operating engine to coat the inner walls of the muffler of the system for antipollution purifying purposes.