Patents Assigned to COMET AG PLASMA CONTROL TECHNOLOGIES
  • Patent number: 11552657
    Abstract: The invention relates to a directional coupler comprising a non-straight main conductor line for receiving a high power signal and at least one coupling element. The main conductor line is arranged to run in a plane P0. The at least one coupling element is arranged sectionally parallel to the main conductor line. Further, the invention relates to a method for measuring RF voltage and/or RF power using a directional coupler. The method comprises the steps of combining the measured signals of the directional coupler and the measured voltage and current values of the VI sensor unit. In case, one of the measured signals has a low or zero level the sensitivity of the measuring of RF voltage and/or RF power is increased.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: January 10, 2023
    Assignee: COMET AG PLASMA CONTROL TECHNOLOGIES
    Inventors: Nikolai Schwerg, André Grede
  • Patent number: 11335538
    Abstract: The invention relates to a filter unit for filtering multiple pulse signals comprising a number of filter circuits, which are connected in parallel. Each filter circuit comprises an input and an output, wherein the input is configured to receive an amplitude of an input signal and the output is configured to activate an output signal. Each filter circuit has an allocated filter level and further comprises a pulse level detection circuit configured to detect a change of state of a pulse level of the input signal. The change of state comprises a transition from a first pulse level to a second pulse level and if the pulse level corresponds to the allocated filter level of the filter circuit the output of said filter circuit is activated.
    Type: Grant
    Filed: July 23, 2020
    Date of Patent: May 17, 2022
    Assignee: COMET AG PLASMA CONTROL TECHNOLOGIES
    Inventors: Manuel vor dem Brocke, Roland Schlierf