Patents Assigned to COMMISSARIAT A L'ENERGIE ATOKMIQUE
  • Publication number: 20070214867
    Abstract: The present invention relates to compounds which can go to make up mesostructured porous hybrid organic-inorganic materials (MPHOIMs) and can serve, within these materials, as probe molecules for the detection or quantitative determination of halogenated gaseous compounds. It also relates to MPHOIMs in which these compounds are grafted by covalent or iono-covalent bonding, to a process for manufacturing these MPHOIMs, and also to chemical sensors for the detection or quantitative determination of halogenated gaseous compounds and comprising these MPHOIMs as sensitive materials. The invention applies, in particular, to the detection and quantitative determination of halogenated gaseous compounds used in the microelectronics field and, more especially, halogenated boron complexes.
    Type: Application
    Filed: April 15, 2005
    Publication date: September 20, 2007
    Applicants: COMMISSARIAT A L'ENERGIE ATOKMIQUE, CENTRE NATIONAL DE LA RECHERCHE, UNIVERSITE PIERRE ET MARIE CURIE (PARIS VI)
    Inventors: Thu-Hoa Tran-Thi, Clement Sanchez, Lionel Nicole, Peter Hesemann