Abstract: According to one aspect, the invention relates to a microbolometer array for thermal detection of light radiation in a given spectral band, comprising a supporting substrate and an array of microbolometers (300) of given dimensions, arranged in an array. Each of said microbolometers comprises a membrane (301) suspended above said supporting substrate, said membrane consisting of an element (305) for absorbing the incident radiation and a thermometric element (304) in thermal contact with the absorber, electrically insulated from said absorber element. The absorber element comprises at least one first metal/insulator/metal (MIM) structure comprising a multilayer of three superposed films of submicron-order thickness i.e. a first metallic film (311), a dielectric film (310), and a second metallic film (309), said MIM structure being able to have a resonant absorption of said incident radiation at at least one wavelength in said spectral band.
Type:
Application
Filed:
July 13, 2012
Publication date:
August 14, 2014
Applicants:
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE-CNRS, Office National D'Etudes Et De Recherches Aerospatiales-ONERA, Commissariat à l'énergies alternatives-CEA
Inventors:
Charlie Koechlin, Patrick Bouchon, Riad Haidar, Jean-Luc Pelouard, Jean-Jacques Yon, Joël Deschamps, Fabrice Pardo, Stéphane Collin
Abstract: A method of and associated device for measuring temperature of an internal surface of a pipe, including: a) at least one temperature-sensitive element that is moved away from a probe, radially with respect to the fore-and-aft axis of the pipe, so as to bring the temperature-sensitive element(s) into contact against the internal surface of the pipe, b) wherein the contact force applied between the sensitive element(s) of the probe and the internal surface is increased until the contact force reaches a defined value at any point on the surface.