Abstract: According to one aspect, the invention relates to a microbolometer array for thermal detection of light radiation in a given spectral band, comprising a supporting substrate and an array of microbolometers (300) of given dimensions, arranged in an array. Each of said microbolometers comprises a membrane (301) suspended above said supporting substrate, said membrane consisting of an element (305) for absorbing the incident radiation and a thermometric element (304) in thermal contact with the absorber, electrically insulated from said absorber element. The absorber element comprises at least one first metal/insulator/metal (MIM) structure comprising a multilayer of three superposed films of submicron-order thickness i.e. a first metallic film (311), a dielectric film (310), and a second metallic film (309), said MIM structure being able to have a resonant absorption of said incident radiation at at least one wavelength in said spectral band.
Type:
Application
Filed:
July 13, 2012
Publication date:
August 14, 2014
Applicants:
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE-CNRS, Office National D'Etudes Et De Recherches Aerospatiales-ONERA, Commissariat à l'énergies alternatives-CEA
Inventors:
Charlie Koechlin, Patrick Bouchon, Riad Haidar, Jean-Luc Pelouard, Jean-Jacques Yon, Joël Deschamps, Fabrice Pardo, Stéphane Collin