Patents Assigned to CONAX TECHNOLOGIES
  • Erosion / corrosion resistant barrier coating
    Patent number: 11674221
    Abstract: Disclosed are barrier coatings for fused silica components used in semiconductor processing. In particular, the present disclosure concerns protective substrate-barrier coatings composed of corrosion-resilient metal compounds which provide superior resistance to erosion/corrosion when a coated substrate is subjected to the acidic environments at elevated temperatures typical for semiconductor processing.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: June 13, 2023
    Assignees: CONAX TECHNOLOGIES, Alfred University
    Inventors: Matthew M. Hall, Timothy Keenan, Lana Margaret Placek, Scott Michael Kroon, William Sean Halligan, Michael Edward Ferraro