Abstract: Disclosed are barrier coatings for fused silica components used in semiconductor processing. In particular, the present disclosure concerns protective substrate-barrier coatings composed of corrosion-resilient metal compounds which provide superior resistance to erosion/corrosion when a coated substrate is subjected to the acidic environments at elevated temperatures typical for semiconductor processing.

Abstract: An improved temperature sensor assembly (15) comprising a temperature sensing probe (16) having a temperature sensing portion (18), a terminal portion (21), and an intermediate portion (20) between the temperature sensing portion and the terminal portion; a mounting element (28) in sliding engagement along a first axis (x-x) with the intermediate portion of the temperature sensing probe such that the temperature sensing probe is movable linearly relative to the mounting element in an axial direction; the mounting element configured to attach to an open tip thermowell (100) such that the temperature sensing portion of the probe is exposed to a process environment (104); the temperature sensing probe comprising a stop (19) configured to bear against a seat (108) in the thermowell; and a spring element (24) arranged between the stop and the mounting element and configured to bias the stop and the mounting element linearly away from each other in the axial direction.

Abstract: An improved temperature sensor assembly (15) comprising a temperature sensing probe (16) having a temperature sensing portion (18), a terminal portion (21), and an intermediate portion (20) between the temperature sensing portion and the terminal portion; a mounting element (28) in sliding engagement along a first axis (x-x) with the intermediate portion of the temperature sensing probe such that the temperature sensing probe is movable linearly relative to the mounting element in an axial direction; the mounting element configured to attach to an open tip thermowell (100) such that the temperature sensing portion of the probe is exposed to a process environment (104); the temperature sensing probe comprising a stop (19) configured to bear against a seat (108) in the thermowell; and a spring element (24) arranged between the stop and the mounting element and configured to bias the stop and the mounting element linearly away from each other in the axial direction.