Abstract: A system for providing in situ analysis of the polishing slip stream during CMP processing is proposed. The system performs real-time measurement and then adjustment of necessary parameters (related to the slurry and/or the planarization process) to reduce process variation. In particular, the system enables the control of multiple process intensification techniques of CMP systems such as, but not limited to, slurry and chemical dispensing, pad vacuum “exhaust”, mass transfer techniques, heat transfer techniques, and mechanical adjustment techniques.

Abstract: An arrangement and method for managing the tribology associated with a chemical mechanical planarization (CMP) process continuously monitors and modifies the properties of a polishing slurry in order to assist in controlling the removal rate associated with the CMP process. The viscosity of slurry as it leaves the CMP system (“spent slurry”) and the material removal rate associated with the semiconductor wafer are measured, and then the viscosity of the incoming slurry is adjusted if the measured material removal rate differs from a desired removal rate. If the removal rate is considered to be too fast, the viscosity of the fresh slurry being dispensed onto polishing pad is decreased; alternatively, if the removal rate is too slow, the viscosity is increased. As an alternative to modifying the viscosity of the slurry (or, perhaps in addition to modifying the viscosity), a lubricant may be added to the slurry to slow down the removal rate.