Patents Assigned to Consejo Superior De Investigaciones Cienti{acute over (f)}icas (CSIC)
  • Patent number: 9356113
    Abstract: The invention concerns a method for producing a field effect transistor having a trench gate comprising: —the forming (110) of at least one trench (11, 12, 13) in a semi-conductive substrate (1) having a first type of conductivity, said substrate comprising two opposing faces called front face and rear face, —the primary implantation (120) of ions having a second type of conductivity so as to implant each trench of the substrate to form an active gate area, —the depositing (160) of a layer of polycrystalline silicon having the second type of conductivity on the implanted active gate area, —the oxidation (160) of the layer of polycrystalline silicon, and —the metallization (180) of the substrate on the front and rear faces of same in order to form active source and drain areas.
    Type: Grant
    Filed: September 5, 2012
    Date of Patent: May 31, 2016
    Assignees: Institut National des Sciences Appliquees de Lyon, Université Claude Bernard Lyon 1, Centre National de la Recherche Scientifique (CNRS), Ecole Centrale De Lyon, Consejo Superior De Investigaciones Cienti{acute over (f)}icas (CSIC)
    Inventors: Dominique Tournier, Florian Chevalier, Philippe Godignon, José Millan