Abstract: A barrier coating against oxygen and water vapor penetration for a plastic packaging film comprising two oxides, one of which is SiO.sub.2 while the other is Al.sub.2 O.sub.3. The barrier is a single layer of mixed oxides in which the concentration of Al.sub.2 O.sub.3 increases continuously from 20% by weight to 80% by weight while the concentration of SiO.sub.2 decreases continuously from 80% by weight to 20% by weight as the thickness of the mixed oxide layer increases from the surface of the plastic film. The plastic film is preferably polyethylene terephthalate or polyphenylene oxide and the barrier coating is transparent.

Abstract: An apparatus for thin layer vapor deposition has two horizontally spaced apart vacuum deposition chambers. Rearwardly and inwardly angled horizontal vacuum ducts are connected to the chambers, and a vacuum pumping device is connected to a further horizontal vacuum duct which communicates with the inwardly angled ducts. A computerized central system disposed between the chambers is operatively connected to the ducts and vacuum pumping device to enable either of the chambers to be used for set-up and evacuation while the other chamber is used for heating and deposition.

Abstract: Apparatus and process for loading substrates into an evacuable fore-chamber and registering the substrates with an opening in a vacuum treatment chamber to which the fore-chamber is attached. The fore-chamber is removably attached to a an external surface of a wall of the vacuum treatment chamber such that an opening in a wall of the fore-chamber is registered with an opening in the wall of the vacuum treatment chamber. A rotatable plate lying along the wall of the fore-chamber has a plurality of substrate holders each dimensioned to register with the opening in the vacuum treatment chamber. Rotation of the plate enables sequential exposure of the substrates to the vacuum treatment chamber for treatment without breaking the vacuum in the vacuum treatment chamber.