Abstract: Provided are a rotational flow generator, a piping system, a semiconductor manufacturing apparatus, and a heat exchanger that enable the clogging of a pipe member to be more effectively prevented. A rotational flow generator 1 comprises a spray port 14a that can be attached to/removed from a pipe member 103 through which a first fluid flows, and that sprays a second fluid in a direction inclined with respect to the center axis line of the pipe member 103. A rotational flow generated by the rotational flow generator 1 can reduce the amount of accretion on an inner wall of the pipe member 103.

Abstract: Provided are a rotational flow generator, a piping system, a semiconductor manufacturing apparatus, and a heat exchanger that enable the clogging of a pipe member to be more effectively prevented. A rotational flow generator 1 comprises a spray port 14a that can be attached to/removed from a pipe member 103 through which a first fluid flows, and that sprays a second fluid in a direction inclined with respect to the center axis line of the pipe member 103. A rotational flow generated by the rotational flow generator 1 can reduce the amount of accretion on an inner wall of the pipe member 103.

Abstract: A coating liquid comprising a polysilazane and a calcium compound is applied to a base material formed from a metal or a ceramic, and the coating liquid is then heated to form a film with apatite forming ability and complete the preparation of a biomaterial. Furthermore, by immersing this biomaterial comprising the film with apatite forming ability in a simulated body fluid, an apatite layer can be formed on top of the film.

Abstract: A coating liquid comprising a polysilazane and a calcium compound is applied to a base material formed from a metal or a ceramic, and the coating liquid is then heated to form a film with apatite forming ability and complete the preparation of a biomaterial. Furthermore, by immersing this biomaterial comprising the film with apatite forming ability in an artificial body fluid, an apatite layer can be formed on top of the film.

Abstract: The present invention provides a coating film, which is not likely to cause cracks on the coated surface and is also capable of improving the resistance of the coated surface, especially oxidation resistance, corrosion resistance, and gas permeation resistance, a member provided with the coating film, and a method for producing the coating film. In the coating film of the present invention, a dense layer containing silicon dioxide as a principal component, which is obtained by heat-treating a solution containing perhydropolysilazane and polyorganosilazane, a ratio of the content of perhydropolysilazane to the total amount of polysilazane including perhydropolysilazane and polyorganosilazane being from 0.65 to 0.95, in air or air containing water vapor, was formed on the surface of a stainless steel plate.