Abstract: A magnetic displacement sensor, where, in order to achieve an improved measurement behavior, magnets are formed in a direction of an x-axis such that a z-component (Bz) of the flux density has an essentially linear characteristic curve in a region of travel and/or the magnets are formed in a direction of a y-axis such that the z-component (Bz) is essentially constant in a region of a transversal offset.

Abstract: Micromachined vibratory gyroscope having two or more coplanar movable masses suspended over a planar substrate. Two perpendicular axes (x and y) are defined within the substrate plane, while a third, the z-axis or input axis, is defined to be perpendicular to the substrate plane. The movements of the two masses along the x-axis are coupled through an electrostatic coupling means so that the natural resonant frequency of the in-phase mode and that of the anti-phase mode are separated from each other for the resonances along the x-axis. When the two masses are driven to vibrate along the x-axis in the anti-phase mode and the device experiences rotation about the z-axis, Coriolis forces act differentially on the masses in the Y-direction, causing the two masses to dither in an anti-phase motion along the y-axis. The anti-phase dithering along the y-axis can be sensed directly by a rate sensor to measure the rate of rotation about the z-axis.