Abstract: In a method for manufacturing a piezoelectric oscillating circuit in thin film technology, wherein the oscillating circuit includes a predetermined natural frequency and a plurality of layers, first of all at least a first layer of the piezoelectric oscillating circuit is generated. Subsequently, by processing the first layer a frequency correction is performed. Subsequently, at least a second layer of the piezoelectric oscillating circuit is generated and processed for performing a second frequency correction.
Type:
Grant
Filed:
November 14, 2008
Date of Patent:
February 5, 2013
Assignee:
Contria San Limited Liability Company
Inventors:
Robert Aigner, Lueder Elbrecht, Martin Handtmann, Stephan Marksteiner, Winfried Nessler, Hans-Joerg Timme