Abstract: The present invention improves the in-plane uniformity of film formation via a plasma treatment.

Abstract: The present invention improves the in-plane uniformity of films formed via a plasma treatment.

Abstract: Provided is a substrate tray which is to be used in a thin-film formation device and makes it easy to improve film quality and film thickness uniformity on a substrate by improving substrate heating efficiency and substrate heating uniformity.

Abstract: A printed Yagi antenna of the present invention has a circuit board, a driven element having an impedance &OHgr;d and being printed on the circuit board, a director element printed on the circuit board, a reflector element printed on the circuit board, a microstrip transmission line, and a coaxial cable having and impedance &OHgr;c. The coaxial cable feeds the driven element via the miscrostrip transmission line and &OHgr;c is approximately equal to &OHgr;d. Further, the spacing between the reflector element, the driven element, and director elements are chosen so that an optimum balance is achieved between directional gain and performance sensitivity. The printed Yagi antenna has a partial folded driven element having a J shape which is grounded at the mid-point of the longest portion of the element. The configuration allows for a coaxial cable to be attached directly to the microstrip transmission line without the use of a matching network or balun.

Abstract: A circuit for detecting whether or not an AC voltage mains is providing an AC voltage above a predetermined point including a full wave bridge and voltage divider, a voltage detection circuit including a pair of transistors and a zener diode, an optical coupler including a light emitting diode (LED) and photo transistor, a comparator circuit for determining whether or not the AC voltage source has been below a predetermined voltage for a predetermined length of time including a comparator circuit such as a comparator or a FET.