Abstract: A system and method for conveying and for accurately handling a generally flat object employing a plurality of support elements. The system comprises: a plurality of vacuum preload drive wheels arranged in one or more drive units, each drive unit comprising at least one vacuum preload drive wheel; one or more vacuum ports located on one or more counter plates adjacent each of the vacuum preload drive wheels, for applying induced holding down forces on the object. The vacuum ports of each drive unit are fluidically connected to a main vacuum pipe with controllable valve to a vacuum source. When the main vacuum pipe is connected to a vacuum source the normal force between the object and the vacuum preload drive wheels is increased and accordingly the lateral drive force is increased.

Abstract: An apparatus for supporting a stationary or moving substantially flat object without physical contact on an fluid-cushion. The object floats on a fluid cushion gap, the apparatus aimed for globally or locally adjusting the gap.

Abstract: A thermal treatment system comprising at least one apparatus for thermally treating an object, the apparatus comprising: one platform or two substantially opposite platforms, where at least one of the platforms has at least one thermal means for heating or cooling of the object; and at least one of the platforms has fluid-mechanical means for supporting the object without contact. The platform has an active surface comprising at least one of a plurality of basic cells, each basic cell having at least one of a plurality of pressure outlets and at least one of a plurality of fluid-evacuation channels. At least one of the pressure outlets of each basic cell is fluidically connected through a flow restrictor to a high-pressure fluid supply, the pressure outlets providing pressurized fluid for maintaining a fluid-cushion between the object and the active-surface of the platform. The flow restrictor characteristically exhibits fluidic return spring behavior.

Abstract: A cleaning device for removing contaminants from a surface of an object to be cleaned, the device adapted to be fluidically connected to a high-pressure gas supply. The device comprises at least one high-pressure passage with a predetermined miniature lateral scale with a high-pressure outlet for accelerating the gas. The high-pressure outlet characterized by at least one narrow lip, where the outlet and the narrow lip defining an active surface. When the active surface of the cleaning device is brought to a predetermined miniature gap from, and substantially parallel to, the surface, thus defining a throat section between the narrow lip and the surface of the object to be cleaned and the gas accelerated to about sonic speeds at the throat section, lateral aeromechanic removal forces are produced that act on the contaminants.