Abstract: A piezoelectric actuating apparatus including a frame, a rotatable element, an actuating structure, and a sensing structure is provided. The rotatable element is disposed in an accommodating opening and connected to the frame through a rotating shaft structure. The rotatable element is configured to reciprocatingly swing relative to the frame with an axis of the rotating shaft structure. The actuating structure is elastically coupled to the rotatable element through at least one first elastic component. The sensing structure is elastically coupled to the rotatable element through at least one second elastic component. The actuating structure is deformed by receiving a driving signal, and drives the rotatable element to rotate around the axis through the at least one first elastic component. The rotating rotatable element is linked to the sensing structure through the at least one second elastic component to be correspondingly deformed, and outputs a sensing signal.

Abstract: A piezoelectric actuating apparatus includes a frame having an opening, a rotatable element, first and second actuating elements, a sensing element, transmission elements, a sensing electrode, and a driving electrode. The rotatable element is in the opening, connected to the frame via a rotating shaft structure, and reciprocatingly swings relative to the frame around an axis of the rotating shaft structure as a center. The first actuating element is connected to the rotatable element. The transmission elements are between the first and second actuating elements, and between the first actuating element and the sensing element. The second actuating element and the sensing element are coupled to the rotatable element via the transmission elements. The sensing electrode is on a part of the transmission elements and the sensing element. The driving electrode is on another part of the transmission elements and the first and second actuating elements.

Abstract: A pressure sensing module includes a substrate and a sensing layer. The substrate has a first surface and a second surface opposite to each other. The substrate includes a stepped cavity and an opening. The stepped cavity extends from the first surface to the second surface, the opening extends from the second surface to the first surface, and the stepped cavity communicates with the opening. The sensing layer is disposed on the first surface of the substrate and covers the first surface of the substrate. The sensing layer includes at least one sensing element and a cross-shaped structure. The cross-shaped structure includes a central portion and a plurality of extending portions connecting the central portion. The central portion and the extending portions respectively include at least one hollow portion. An orthographic projection of the central portion of the cross-shaped structure on the substrate overlaps with the opening of the substrate.

Abstract: A piezoelectric actuating apparatus including a frame, a rotatable element, an actuating structure, and a sensing structure is provided. The rotatable element is disposed in an accommodating opening and connected to the frame through a rotating shaft structure. The rotatable element is configured to reciprocatingly swing relative to the frame with an axis of the rotating shaft structure. The actuating structure is elastically coupled to the rotatable element through at least one first elastic component. The sensing structure is elastically coupled to the rotatable element through at least one second elastic component. The actuating structure is deformed by receiving a driving signal, and drives the rotatable element to rotate around the axis through the at least one first elastic component. The rotating rotatable element is linked to the sensing structure through the at least one second elastic component to be correspondingly deformed, and outputs a sensing signal.

Abstract: A joint actuator of a robot includes a casing, a driving device, a driving shaft, a reducer, and a sensor. The driving device is disposed in the casing. The driving shaft is disposed in the casing and connected to the driving device, and the driving device is adapted to drive the driving shaft to rotate. The reducer is disposed in the casing and includes a power input component and a power output component. The power input component and the power output component are sleeved around the driving shaft, and the power input component is connected between the driving shaft and the power output component. The sensor is disposed on the power input component or the casing.

Abstract: A sensing module including a circuit substrate, a sensing element, a packaging material and a blocking structure is provided. The sensing element, the packaging material and the blocking structure are disposed on the circuit substrate. The sensing element comprises a sensing portion. The outer side surface of the blocking structure is in direction contact with the packaging material to define a boundary of the packaging material. The sensing portion is disposed in a region encircled by the boundary of the packaging material, and the maximum thickness of the packaging material from a surface facing away from the circuit substrate to the circuit substrate is less than or equal to a distance from the second surface of the blocking structure to the circuit substrate.

Abstract: A variable focal length optical element including a light-transmitting layer, a cover, a gel, a piezoelectric film, and a driving electrode is provided. The cover has a first through hole to define a light-passing area. The cover, an adhesive layer, and the light-transmitting layer surround and form a first cavity together, and the gel is filled in the first cavity. The driving electrode is configured to drive the piezoelectric film, so that the piezoelectric film is deformed to pull the light-transmitting layer to bend and deform to squeeze the gel in the first cavity, and thereby controls a curvature change of an optical surface formed in the light-passing area by the gel protruding out from the first through hole.

Abstract: A micro scanning mirror, including a fixed substrate, a lens, and multiple cantilevers, are provided. Each cantilever includes a piezoelectric material structure, multiple first drive electrodes, and multiple second drive electrodes. The piezoelectric material structure includes a connecting part, a folding part, and a fixed part. The connecting part connects the lens along a direction parallel to a central axis of the lens. The folding part has a bending region and multiple drive electrode regions. The fixed part is connected to the fixed substrate, and the folding part is connected to the connecting part and the fixed part. The first drive electrodes and the second drive electrodes are respectively located in the corresponding drive electrode regions in the folding part. The micro scanning mirror of the disclosure can drive a large-sized micro mirror to rotate at an appropriate rotation angle.

Abstract: A force sensor includes a circuit board, a sensing element, and a first gel. The sensing element is disposed on the circuit board, wherein the sensing element has a top surface and a bottom surface opposite to each other and has a sensing portion. The bottom surface faces the circuit board. The sensing portion is located at the top surface. The first gel is disposed on the top surface and covers the sensing portion, wherein the sensing portion is adapted to generate a sensing signal through an external force transferred from the first gel to the top surface.

Abstract: A microelectromechanical apparatus includes a substrate, a light diffuser device, a plurality of actuator devices, and a controller. The light diffuser device is disposed on the substrate. The actuator devices surround the substrate and are coupled to the substrate. The controller is coupled to the actuator devices. The controller applies a voltage to at least one of the actuator devices to drive the substrate and to control the light diffuser device to actuate according to a reference axis perpendicular to the light diffuser device. A projection apparatus is also provided. In the disclosure, a motion pattern and motion complexity of the light diffuser device may be enhanced. Enhancement of the movement pattern and movement complexity may lead to a significant increase in a speckle pattern contrast ratio, such that the projection apparatus may provide favorable image quality.

Abstract: A micro scanning mirror includes a lens, a piezoelectric material layer, two first rotating shaft elements, and first driving electrodes. A first axial direction passes through a center of the lens. The piezoelectric material layer is arranged along a circumferential direction of the lens and has first driving electrode regions. Each first spacing region where the piezoelectric material layer is not disposed is formed between two adjacent first driving electrode regions. Each first rotating shaft element is located between one of the first spacing regions and the corresponding adjacent first driving electrode region, and the first rotating shaft element connect the lens and the piezoelectric material layer located in the first driving electrode regions. The first driving electrodes are respectively located on the corresponding first driving electrode regions. The micro scanning mirror can obtain a large rotation angle of the mirror on the same driving condition and has good reliability.

Abstract: A force sensor includes a sensing element, a first circuit board, and at least one second circuit board. The sensing element has a top surface and the bottom surface opposite to each other and has a sensing portion, wherein the sensing portion is located at the top surface. The first circuit board is disposed on the top surface and is electrically connected to the sensing element. The at least one second circuit board is connected to the first circuit board, wherein the at least one second circuit board shields the sensing element. The sensing portion is adapted to generate a sensing signal through an external force transferred from the first circuit board to the top surface.

Abstract: A microelectromechanical apparatus includes a substrate, a light diffuser device, a plurality of actuator devices, and a controller. The light diffuser device is disposed on the substrate. The actuator devices surround the substrate and are coupled to the substrate. The controller is coupled to the actuator devices. The controller applies a voltage to at least one of the actuator devices to drive the substrate and to control the light diffuser device to actuate according to a reference axis perpendicular to the light diffuser device. A projection apparatus is also provided. In the disclosure, a motion pattern and motion complexity of the light diffuser device may be enhanced. Enhancement of the movement pattern and movement complexity may lead to a significant increase in a speckle pattern contrast ratio, such that the projection apparatus may provide favorable image quality.

Abstract: A force sensor includes a circuit board, a sensing element, and a first gel. The sensing element is disposed on the circuit board, wherein the sensing element has a top surface and a bottom surface opposite to each other and has a sensing portion. The bottom surface faces the circuit board. The sensing portion is located at the top surface. The first gel is disposed on the top surface and covers the sensing portion, wherein the sensing portion is adapted to generate a sensing signal through an external force transferred from the first gel to the top surface.

Abstract: A force sensor includes a sensing element, a first circuit board, and at least one second circuit board. The sensing element has a top surface and the bottom surface opposite to each other and has a sensing portion, wherein the sensing portion is located at the top surface. The first circuit board is disposed on the top surface and is electrically connected to the sensing element. The at least one second circuit board is connected to the first circuit board, wherein the at least one second circuit board shields the sensing element. The sensing portion is adapted to generate a sensing signal through an external force transferred from the first circuit board to the top surface.