Abstract: Methods and apparatus provide for: a first source of plasma (first plasma), which includes a first species of ions, directing the first plasma out along a first axis; a second source of plasma (second plasma), which includes a second, differing, species of ions, directing the second plasma out along a second axis; and an accelerator system in communication with the first and second sources of plasma, and operating to: (i) accelerate the first species of ions at a first magnitude therethrough, and toward a semiconductor wafer, and (ii) simultaneously accelerate the second species of ions at a second magnitude, different from the first magnitude, therethrough, and toward the semiconductor wafer.

Abstract: A grating is provided having a generally s-shaped waveguide configuration. The grating includes a plurality of waveguides arranged adjacent to one another to form an array. The array includes a first portion bending in a counter-clockwise direction, a second portion bending in a clockwise direction, and a third portion extending in a straight direction. The arc length of each waveguide along the counter-clockwise bend portion varies from one waveguide to the next. At its minimum, the arc length is nearly zero. The different arc lengths along the counter-clockwise bend cause some waveguides to be longer than others. This results in a clear separation of the individual waveguides. Further, the overall dimension of the grating is smaller than conventional devices which leads to reduced cross-talk.

Abstract: This invention is directed to photosensitively opacifiable glasses consisting essentially, in weight percent, of about 14-18% Na.sub.2 O, 0-6% Zno, 6-12% Al.sub.2 O.sub.3, 0-5% B.sub.2 O.sub.3, 0-0.2% Sb.sub.2 O.sub.3, 0-0.1% SnO, 65-72% SiO.sub.2, and 0.007-0.04% Ag, 0.008-0.05% CeO.sub.2, 0.7-1.25% Br, and 1.5-2.5% F as analyzed in the glass, the sum of those components constituting at least 90% of the total composition, which, through an exposure to ultraviolet radiation, followed by a three-step heat treatment, and then a re-exposure to ultraviolet radiation at an elevated temperature, can be converted into a colored opal glass.