Patents Assigned to Cornell Research Foundcatton, Inc.
  • Electrically isolated released microstructures
    Patent number: 5847454
    Abstract: A single mask, low temperature reactive ion etching process for fabricating high aspect ratio, released single crystal microelectromechanical structures independently of crystal orientation.
    Type: Grant
    Filed: September 22, 1994
    Date of Patent: December 8, 1998
    Assignee: Cornell Research Foundcatton, Inc.
    Inventors: Kevin A. Shaw, Z. Lisa Zhang, Noel C. MacDonald