Abstract: A scanning electron microscope according to the present invention enables a column to be detached from a sample installation unit, thereby addressing issues related to the column, such as simple calibration related to the column, tilt of a beam, replacement of consumables, etc., by replacing the entire column. As such, the scanning electron microscope has the advantage of being simply and easily repaired and maintained.

Abstract: Disclosed is a combine apparatus of a scanning electron microscope and an energy dispersive x-ray spectroscopy in that the scanning electron microscope and the energy dispersive x-ray are combined, whereby unifying as one apparatus. The combine apparatus of the scanning electron microscope and the energy dispersive x-ray spectroscopy includes: an image generation means for detecting electrons emitted from a sample for measuring a shape of the sample and simultaneously generating a scanning electron microscope image for analyzing an x-ray; a controller for generating a display control signal and a specific position storing control signal of the image generated from the image generation means; and an x-ray measuring circuit for accumulating an energy level on a specific position of the image generated from the image generation means according to the specific position storing control signal generated by the controller to provide an element information thereof.