Abstract: The present invention discloses an electrostatic chucking device having a laminated structure which is formed by sequentially laminating a first insulation layer, an electrode layer and a second insulation layer on metal substrate, wherein the first insulation layer and the second insulation layer are constituted of polyimide films, and at least the adhesion between the metal substrate and the first insulation layer, and, preferably, further, the adhesions including the adhesion between the first insulation layer and the electrode layer and the adhesion between the electrode layer and the second insulation layer are performed by using thermoplastic polyimide-based adhesive films having a film thickness of 5 to 50 &mgr;m.

Abstract: An unmanned apparatus for collecting scrap aluminum cans and for compensating depositors based on the weight of such cans deposited includes a micro-processor control means which produces control signals for operating the apparatus and dispensing compensation, calibrating a weighing means, monitoring and displaying the existence of alarm conditions and de-energizing the apparatus until the conditions which caused the alarm are corrected. Further, a communication port is provided to transmit and receive remote information as for example from a central dispatch. The compensation and the rate thereof is controlled by a permanent non-volatile memory means and the weight of the cans upon which compensation is based is displayed to the depositor.