Patents Assigned to Credence Systems Corp
  • Method and apparatus for the improvement of material/voltage contrast
    Patent number: 7488937
    Abstract: A method and system for registering a CAD layout to a Focused Ion Beam image for through-the substrate probing, without using an optical image and without requiring biasing, includes an improved method of trench endpointing during the FIB milling operation with a low beam energy. The method further includes removal of Ga at the trench floor using XeF2, as well as the deposition of an insulating layer onto the trench floor.
    Type: Grant
    Filed: October 17, 2005
    Date of Patent: February 10, 2009
    Assignee: Credence Systems Corp
    Inventors: Erwan Le Roy, William B. Thompson