Patents Assigned to Crossing Automation, Inc.
  • Publication number: 20140068753
    Abstract: An access arbitration module includes a plurality of active component communication ports for communicating with a plurality of active components, and includes a passive component communication port for communicating with a passive component. The access arbitration module also includes switching logic defined to control transmission of access communication protocol signals between each of the plurality of active component communication ports and the passive component communication port, such that an authorized one of the plurality of active component communication ports is connected in communication with the passive component communication port at a given time, and such that non-authorized ones of the plurality of active component communication ports are prevented from communication with the passive component communication port at the given time.
    Type: Application
    Filed: September 6, 2012
    Publication date: March 6, 2014
    Applicant: Crossing Automation, Inc.
    Inventors: Pablo Gonzalez, Gary Roy Watts
  • Publication number: 20120321423
    Abstract: A workpiece container storage and handling system includes a base, a number of wheels connected to the base, and a container handling system connected to the base. The wheels provide for movement of the base. The container handling system is defined to hold at least two containers in a vertically overlying orientation relative to each other. The container handling system is defined to provide for controlled vertical travel of the at least two containers in unison relative to the base. Also, the container handling system is defined to provide for controlled and independent horizontal travel of each of the at least two containers relative to the base.
    Type: Application
    Filed: May 18, 2012
    Publication date: December 20, 2012
    Applicant: Crossing Automation, Inc.
    Inventors: Robert B. MacKnight, Anthony C. Bonora
  • Publication number: 20120301260
    Abstract: A spiral cam has a tubular shaped portion defined by an interior cavity and an exterior surface that includes a cam contour. A linear slide assembly having a length defined along a rotational axis is defined to slide lengthwise into the interior cavity of the spiral cam. The linear slide assembly allows for movement of the spiral cam along the rotational axis and prevents rotation of the spiral cam relative to the linear slide assembly. A cam roller is fixed at a position proximate to the exterior surface of the spiral cam. The cam roller is disposed separate from the linear slide assembly and within the cam contour of the spiral cam. The cam roller engages the cam contour to move of the spiral cam along the rotational axis when the linear slide assembly and spiral cam are rotated in unison about the rotational axis relative to the cam roller.
    Type: Application
    Filed: April 26, 2012
    Publication date: November 29, 2012
    Applicant: Crossing Automation, Inc.
    Inventor: Anthony C. Bonora
  • Publication number: 20120189408
    Abstract: An end effector having a first arm and a second arm extending from an end effector support body is provided. The first arm and the second arm each have support extensions for supporting a peripheral region of a substrate on opposing sides of a diameter of the substrate. The height of support contacts on opposing sides of the diameter is different relative to a horizontal datum plane. In one embodiment, the end effector includes additional arms extending from the end effector support body. A system for supporting a substrate is provided also.
    Type: Application
    Filed: March 30, 2012
    Publication date: July 26, 2012
    Applicant: CROSSING AUTOMATION, INC.
    Inventor: Anthony C. Bonora
  • Publication number: 20120000816
    Abstract: A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.
    Type: Application
    Filed: June 30, 2010
    Publication date: January 5, 2012
    Applicant: Crossing Automation, Inc.
    Inventor: Anthony C. Bonora
  • Patent number: 7841820
    Abstract: The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
    Type: Grant
    Filed: November 9, 2007
    Date of Patent: November 30, 2010
    Assignee: Crossing Automation, Inc.
    Inventors: Anthony C. Bonora, Richard H. Gould, Roger G. Hine, Michael Krolak, Jerry A. Speasl
  • Publication number: 20100290872
    Abstract: A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop.
    Type: Application
    Filed: May 14, 2010
    Publication date: November 18, 2010
    Applicant: Crossing Automation, Inc.
    Inventors: Anthony C. Bonora, Richard H. Gould, Michael Krolak
  • Publication number: 20100290873
    Abstract: A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used for loading and unloading substrates to be processed. The storage system locally stores one or more containers of substrates. The storage system assembly includes a plurality of storage shelves, and each of the plurality of storage shelves have shelf plates with shelf features for supporting a container. Each of the plurality of storage shelves are coupled to a chain to enable horizontal movement and each is further coupled to a rail to enable guiding to one or more positions. A motor is coupled to a drive sprocket for moving the chain, such that each of the plurality of storage shelves move together along the rail to the one or more positions. The rail has at least some sections that are linear and some sections that are nonlinear and the sections are arranged in a loop.
    Type: Application
    Filed: May 14, 2010
    Publication date: November 18, 2010
    Applicant: Crossing Automation, Inc.
    Inventors: Anthony C. Bonora, Richard H. Gould, Michael Krolak
  • Patent number: 7748944
    Abstract: A method and apparatus for semiconductor processing is disclosed. In one embodiment, a method of transporting a wafer within a cluster tool, comprises placing the wafer into a first segment of a vacuum enclosure, the vacuum enclosure being attached to a processing chamber and a factory interface. The wafer is transported to a second segment of the vacuum enclosure using a vertical transport mechanism, wherein the second segment is above or below the first segment.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: July 6, 2010
    Assignee: Crossing Automation, Inc.
    Inventors: JB Price, Jed Keller, Laurence Dulmage, David Cheng
  • Patent number: 7737567
    Abstract: A semiconductor substrate is provided. The substrate includes a first surface and an opposing second surface, wherein the first surface includes a marking in a centroid region of the first surface. The marking indicates a location of a center point on the first surface of the semiconductor substrate or identification data unique to the substrate. A system, methods of transporting and marking, and a device for reading the substrate markings are also provided.
    Type: Grant
    Filed: June 20, 2008
    Date of Patent: June 15, 2010
    Assignee: Crossing Automation, Inc.
    Inventors: Anthony C. Bonora, Raymond S. Martin, Michael Krolak
  • Patent number: 7669903
    Abstract: The present invention comprises a vacuum end effector having workpiece supports that work in conjunction with distorted workpiece surfaces. In one embodiment, each workpiece support has the ability to gimbal and conform the workpiece surface in contact with an outer edge of the support. Each workpiece support preferably provides a knife-like contact edge to minimize the contact area between the support and the workpiece while still providing an effective vacuum area to hold the wafer securely on the support. In another embodiment, each workpiece support is replaceable without having to remove the end effector from the robot assembly.
    Type: Grant
    Filed: October 11, 2007
    Date of Patent: March 2, 2010
    Assignee: Crossing Automation, Inc.
    Inventors: Anthony C. Bonora, Roger G. Hine
  • Patent number: 7648327
    Abstract: The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a linear drive for moving the wafer along a radial axis. The linear drive for moving the wafer along a z axis is offset from the rotational drive. When the rotational drive rotates about the theta axis, both the z axis and radial axis drives are also rotated about the theta axis. Preferably, the linear drive for moving the wafer along a radial axis is a dual or rapid swap slide body mechanism having an upper and lower end effector. The slide body mechanism preferably also has means to align the wafer and perform various inspection and marking procedures.
    Type: Grant
    Filed: December 16, 2005
    Date of Patent: January 19, 2010
    Assignee: Crossing Automation, Inc.
    Inventors: Anthony C. Bonora, Richard H. Gould, Roger G. Hine, Michael Krolak, Jerry A. Speasl