Abstract: The invention relates to a method of simulation of semiconductor devices, such as wide-bandgap devices. The method employs a device substitution technique and involves simulation of a device which is structurally similar to the target device, and for which it is relatively easy to compute a model. Such a device may have a reduced material bandgap or a different doping/fixed-charge concentration. Based on the model of the simplified device, a model of the device under consideration is produced via a sequence of simulation steps, wherein simulated intermediate devices eventually transform into the target device for which a model is sought.