Abstract: A mobile injector system with a CVD door assembly including flexible tubing secured to the door, a hole for accommodating a SiC or like paddle, and an injector clamp securing the injector tubes to the paddle. The CVD door assembly mates to a gas ring. A gas inlet channel extends through the CVD door assembly to communicate with the flexible tubing and with the injector tubes. The gas ring secures to a back ring and over and about an annular flange on the end of a process tube. Gas inlet channels extend through the gas ring to connect to gas inlet couplings to communicate with gas inlet ports in the CVD door. The injector tubes are in a predetermined geometrical proximity to the paddle, and provide for repeatability of processes for the semiconductor wafers or substrates.

Abstract: Atmospheric door closure for sealing of the orifice of a process tube. A quartz end plate positions at the end of a plurality of spring loaded quartz rods to seal against the orifice of the process tube. The quartz rods slide against spring pressure behind Teflon sleeves contained in horizontal tubes. Springs in the horizontal tubes provide pressure against the quartz end plate when the quartz plate engages a process tube. A clamp and adjusting assembly secures to the paddle support shaft, and provides for alignment of the quartz rods and plate with respect to the paddle support shaft and the orifice of the process tube.

Abstract: A movable cantilevered purge system providing for a wafer load position, a wafer purge position, and a wafer process position. The movable cantilevered purge system includes an elephant carrier vehicle for movement of a movable quartz elephant tube. The movable quartz elephant tube includes a purge injector and a return exhaust tube. A cantilevered paddle clamping vehicle moves behind the movable quartz elephant carrier vehicle and holds a silicon carbide or ceramic paddle. The elephant carrier vehicle includes a quartz sealing ring and a stainless steel sealing ring carried on pivotable adjusting blocks, and are supported by a plurality of cylindrical tubes. The quartz sealing ring concentrically positions about the process tube of the furnace and a metal ring positions about a scavenger face. The return exhaust tube connects back into the scavenger area of the furnace.