Abstract: A wheeled chassis assembly for a sorption column in the form of a vat (1) for cleaning waste gases has at the bottom end thereof a depending foot rim (5) and an outwardly projecting corrugation (4). Wheel mounts (14) with wheels (7) thereon are pivotally secured to wheel brackets (6). Each wheel bracket (6) has an engagement surface (16) pressed onto the outside surface of vat (1) between foot rim (5) and corrugation (4) by a counter-piece (17) engaging the inside surface of foot rim (5) and threadingly coupled to wheel bracket (6). Engagement surfaces (16 and 18) are curved to conform with the outside surface of vat (1) and the inside surface of foot rim (5), respectively. Below an engagement surface (16), a wheel bracket (6) has an annular groove (19) for receiving a foot rim (5), its upper area having an inclined curved portion (21) for engaging the corrugation (4) and shaped to conform with the configuration thereof.

Abstract: In order to clean the waste gases from a processing system (1), in which a process using non-metal halide is carried out, the waste gas (3) is mixed with a gas (7) that prevents recombination of ionized particles formed from the non-metal fluoride. In a gas discharge chamber (25), the waste gas (3, 7) is then converted into a plasma in which the non-metal halide, present in the waste gas (3, 7), is ionized. The ionized particles, that have been saturated with the gas, prevent the recombination thereof and can then be removed from the waste gas.

Abstract: A sorption column for waste-gas cleaning has a vat-shaped housing (1) for receiving a solid stationary sorbent, an inlet for waste gas to be cleaned into the housing (1) and an outlet for cleaned waste gas out of the housing (1). The housing circumferential wall (2) is provided in the area of the housing bottom (3) and the housing cover (4) in each case with a depression (9, 10) for receiving a ball valve (11) at the waste gas inlet or a ball valve (12) at the waste gas outlet.

Abstract: In order to evaporate a liquid substance (3) and convey it to a user, a bubbler (1) is provided, into which a carrier gas (7) is conveyed. When a minimum level (4) has been reached, an exact quantity of the substance (3) is refilled from a reservoir tank (15). For this purpose, an intermediate tank (25) is provided, which is filled with an inert gas up to a pressure P1. An inert gas (21) is applied to the reservoir tank (15) at a pressure P2, higher than P1. The intermediate tank (25) is connected with the reservoir tank (15), as a result of which a specific quantity of the substance (3) flows into the intermediate tank (25) and is conveyed via a connection line (17) to the bubbler (1), with inert gas (32) first having been applied to the connection line (17) at a pressure P3, lower than P2.

Abstract: In the framework of the method for minimizing the error of a measured variable, particularly a signal to be measured using filtering at variable bandwidth, the bandwidth is regulated on the basis of a physical criterion inherent to the method in such a ways that signal changes not caused by noise are recognized as early as possible.

Abstract: Apparatus for weighing out the remaining quantity of a substance in a storage vessel disposed in a cabinet and attached with rigid connecting lines to a valve plate fastened in the cabinet and from which rigid connecting lines lead to a consumer. The apparatus includes at least one load cell on which the storage vessel is set down, and a stand is provided having fastened thereto a platform provided with the load cell. The stand is set down on the cabinet floor and/or suspended on a cabinet wall, and the valve plate is fastened to the stand.

Abstract: An apparatus for measuring the concentration of a substance in a specimen. The apparatus includes a housing that defines a chamber for the specimen. A radiation source mounted to the housing emits radiation at a wavelength at which the radiation is absorbed by the substance. Two spaced apart receivers are mounted to the housing. Both receivers detect radiation at the wavelength at which it is absorbed by the specimen. Two concave mirrors are disposed in the housing. The mirrors are positioned to split the radiation emitted by the source into two beams, each of the beams being directed to a separate one of the receivers and so that the paths of travel of the beams from the source to the separate receivers are of different lengths. The concentration of the substance is determined by based on the difference in radiation detected by the receivers.