Abstract: An apparatus includes a filter body, which filters an exhaust gas and feeds it to an adsorption reaction device and is disposed below the adsorption reaction device; and a housing which provides an internal space for storing powder separated from the filter body and is installed below the adsorption reaction device, which housing includes a filter installation unit, which is a space projected below the adsorption reaction device and which provides a filter installation space internally for installing the filter body and an expansion unit that protrudes sideways from the filter installation unit and provides an expansion space which communicates internally with the filter installation space, and the internal space is expanded by the expansion space to increase the powder collection capacity. A suction port for sucking in the exhaust gas is installed in the expansion unit.

Abstract: The present invention presents a scrubber burner composed of a preheating spray ring that is formed with a porous material with certain thickness, and that preheats and sprays the fuel gas in the preheating combustion space formed inside, a preheating guide ring equipped with multiple preheating guide holes that wrap the outer circumference of the aforementioned preheating spray ring, and that penetrates from the outer circumference to the inner circumference, and a preheating burner module equipped with a housing that forms a ring shaped gas channel that is separated from the outer circumference of the aforementioned preheating guide ring and through which the aforementioned fuel gas flows.

Abstract: Provided in the present invention is an apparatus for collecting powder in exhaust gas comprising: a device for collecting powder contained in exhaust gas before the exhaust gas is introduced into a cylindrical adsorption reaction device that treats the exhaust gas using an adsorption reaction, wherein a cylindrical filter body includes a filter member that filters the exhaust gas and is disposed underneath the adsorption reaction device so as to be connected to the adsorption reaction device; a housing that provides an internal space to house the filter body, and a filter striking module that applies a physical impact to the filter body to dislodge powder adhering to the filter member.

Abstract: A method of fabricating a semiconductor device includes providing a wafer inside a process chamber, performing an ALD (atomic layer deposition) process inside the process chamber to deposit titanium nitride on the wafer, providing a process gas used for the ALD process to a scrubber, filtering a first powder contained in the process gas, using a filter unit disposed in the scrubber and including a plurality of filters, adsorbing a second powder remaining in the process gas after passing through the filter unit, using a fin structure extending in a vertical direction inside the filter unit, and exhausting the process gas, from which the first and second powders are removed, from the scrubber.

Abstract: The present invention discloses a burner for a scrubber comprising a housing including a combustion zone to which waste gas is entered, the combustion zone having an internal central region and an opened lower portion, the housing including a mixing zone for mixing an oxidizer and fuel entered thereinto, the mixing zone being disposed along an outer side of the combustion zone and formed into a ring shape; and a metal cartridge disposed between the combustion zone and the mixing zone and provided with apertures for supplying the oxidizer and fuel mixed in the mixing zone to the combustion zone.