Abstract: Angular rate sensor for detecting rotation about first and second mutually perpendicular axes which has first and second masses coupled together for torsional drive mode oscillation of equal amplitude and opposite phase about third axes which are perpendicular to the first and second axes. The first mass is mounted for oscillation about the second axis in response to Coriolis forces produced by rotation about the first axis, and the second mass is mounted for oscillation about the first axis in response to Coriolis forces produced by rotation about the second axis. In some disclosed embodiments, the rate sensor also includes a pair of accelerometer masses which are connected together for torsional movement of equal amplitude and opposite phase about axes parallel to the third axes in response to acceleration along the second axis and for torsional movement of equal amplitude and opposite phase about axes parallel to the second axis in response to acceleration along the third axes.

Abstract: A pressure sensor system for measuring the pressure of a corrosive media includes a silicon plate forming a diaphragm and a glass plate or ring bonded to said silicon plate with an opening over the diaphragm. The diaphragm has resistive areas of different orientations to provide first resistive areas which have increased resistance with diaphragm deflection, and other areas which have decreased or little change in resistance with diaphragm deflection. The resistive areas may be formed by doping the silicon plate. The resistive areas have broad doped connectors extending outward to areas beyond the seal between the glass plate or ring, to wire bond areas on the silicon plate. Accordingly, the wire bond pads are not exposed to the corrosive media.

Abstract: A preformed sensor housing including a conduit having an inside; a plug disposed within the conduit; and a deposit covering a portion of the plug and a portion of the conduit. A method is also disclosed for creating a thin film diaphragm on a housing including the step of inserting a sacrificial element into the housing; depositing a diaphragm material onto the sacrificial element and the housing; and removing the sacrificial element.

Abstract: An angular displacement sensor. The input shaft is supported by a housing and fixed to a main gear. A plurality of secondary gears are arranged around and meshed with the primary gear. A plurality of displacement sensors are integrally coupled with the secondary gears. Advantageously, the main shaft is formed with a shear notch. Further, each of the secondary gears are coupled to the displacement sensors so as to break free in case of a jam.

Abstract: A dual rate force transducer is disclosed. A spring is machined to have a first spring portion with a first spring rate, a second spring portion with a second spring rate, and a platen between the spring portions. A pair of flanges are affixed to the distal ends of the spring portions. At least one sensor is affixed to one of the flanges, and at least one other sensor is affixed to another one of the flanges. Mounting hardware is used to couple the springs, flanges and platen together, including at least one mechanical stop to limit displacement of the spring.