Abstract: Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity despite the parasitic capacitance that is created. The capacitive sensor element assembly, comprises a first semiconductive layer, and a first conductive layer, a first dielectric layer into which a cavity has been formed, the dielectric layer lying between the first semiconductive layer and the first conductive layer, wherein an electrical connection is made to the second conductive layer. A preferred method for fabricating a capacitive sensor assembly of the present invention comprises the steps of forming a dielectric layer on top of a conductive handle wafer; creating at least one cavity in the dielectric layer, bonding a thin semiconductive layer to the dielectric layer and connecting an operational amplifier to the input of the capacitive sensor assembly to overcome the parasitic capacitance formed during fabrication.

Abstract: Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and method includes fabricating an off-centered elliptically shaped center electrode, at least one elliptical annular-like electrode around the center electrode, a ground electrode and a method for fusing the layers together to optimize sensitivity.

Abstract: Described herein is an integrated pressure sensor assembly. The integrated pressure sensor assembly includes a printed circuit board assembly comprising a plurality of boards; a pressure die mounted on at least a portion of the printed circuit board assembly; and a housing engaged to the printed circuit board assembly. The printed circuit board assembly includes at least one pressure transmission channel and at least one electrical transmission channel.

Abstract: Micromachined accelerometer having one or more proof masses (16, 36, 37, 71, 72) mounted on one or more decoupling frames (17, 38, 39) or on a shuttle (73) such that the proof mass(es) can move along a first (y) axis in response to acceleration along the first axis while being constrained against movement along a second (x) axis and for torsional movement about a third (z) axis perpendicular to the first and second axes in response to acceleration along the second axis. Electrodes (26, 53, 54, 78, 79) that move with the proof mass(es) are interleaved with stationary electrodes (27, 56, 57, 81, 82) to form capacitors (A-D) that change in capacitance both in response to movement of the proof mass(es) along the first axis and in response to torsional movement of the proof mass(es) about the third axis, and circuitry (31-34) connected to the electrodes for providing output signals corresponding to acceleration along the first and second axes.

Abstract: The pressure at a pressure sensor is cycled between a higher (upstream) pressure and a lower (downstream) pressure. The pressure sensor senses the higher and lower pressures, and the difference therebetween is calculated and output. The pressure sensor can be a “single-pressure” pressure sensor (gage or absolute) where the pressure sensor is alternately connected between the two pressures.

Abstract: Described herein is a seat belt tension sensor assembly that includes an anchor plate adapted to be secured to an object, a housing associated with and movable with respect to the anchor plate, wherein the housing defines a cavity therein, and a sense element disposed in the cavity. The sense element is adapted to produce an output in response to a force placed thereon. The output provided by the sense element is a function of the force placed on the housing by a seat belt up to a predetermined maximum value. The housing does not move until the maximum value is reached, and, after the maximum value is reached, the output of the sense element does not substantially change from the maximum value.

Abstract: Dithering mechanism and method for eliminating the effects of zero-rate bias in a rate sensor or gyroscope. Both continuously moving and indexing embodiments are disclosed. The mechanism includes a first part mounted in a fixed position centered about a dither axis perpendicular to the input axis of the gyroscope, a second part disposed coaxially of the first part and affixed to the sensing element of the gyroscope, and a plurality of piezoelectrically driven quartz flexure beams extending radially between the first and second parts for dithering the second part about the dither axis. In some embodiments, the dithering mechanism is formed separately from and affixed to the sensing element of the gyroscope, and in others it is formed integrally with the sensing element.

Abstract: Tuning fork and method in which a pair of elongated tines having front and rear surfaces are disposed symmetrically about an axis, and balancing masses on the front surface of one tine and on the rear surface of the other tine are trimmed to reduce quadrature error and also to maintain mass balance between the tines.

Abstract: Inertial measurement system and method in which a gyroscope is periodically dithered about an axis perpendicular to its input axis, a signal from the gyroscope is delayed to provide a delayed signal which lags the gyroscope signal by one-half of the dithering period, and the delayed signal and the signal from the gyroscope are combined to provide an output signal from which the bias has been cancelled.

Abstract: An analysis system, tool, and method for performing downhole fluid analysis, such as within a wellbore. The analysis system, tool, and method provide for a tool including a spectroscope for use in downhole fluid analysis which utilizes an adaptive optical element such as a Micro Mirror Array (MMA) and two distinct light channels and detectors to provide real-time scaling or normalization.

Abstract: Dithering mechanism and method for eliminating the effects of zero-rate bias in a rate sensor or gyroscope. Both continuously moving and indexing embodiments are disclosed. The mechanism includes a first part mounted in a fixed position centered about a dither axis perpendicular to the input axis of the gyroscope, a second part disposed coaxially of the first part and affixed to the sensing element of the gyroscope, and a plurality of piezoelectrically driven quartz flexure beams extending radially between the first and second parts for dithering the second part about the dither axis. In some embodiments, the dithering mechanism is formed separately from and affixed to the sensing element of the gyroscope, and in others it is formed integrally with the sensing element.

Abstract: A voice coil actuator having a capacitive sensor. A magnetic housing contains at least one magnet, and has a wall that defines a first cavity. A magnetic core is coupled to the magnetic housing and extend from an interior surface of the magnetic housing in a direction of a center axis of the wall of the magnetic housing. A coil assembly has a wall defining a second cavity that at least partly envelops the magnetic core, disposed at least partly inside the first cavity, and adapted to move linearly with respect to the magnetic housing. The coil assembly forms a capacitive sensor with the magnetic core, the capacitive sensor adapted to measure at least one of position, velocity and acceleration of the coil assembly with respect to the magnetic housing.

Abstract: System having one or more inertial sensors in which one or more of the sensor input axes are modulated in orientation about an axis substantially perpendicular to the input, or sensitive, axis of the sensor and, in some embodiments, by also enhancing the accuracy of such a system to provide improved signal to noise ratio and reduced sensitivity to errors in alignment of the sensor axes to the dither axes.

Abstract: Angular rate sensor for detecting rotation about first and second mutually perpendicular axes which has first and second masses coupled together for torsional drive mode oscillation of equal amplitude and opposite phase about third axes which are perpendicular to the first and second axes. The first mass is mounted for oscillation about the second axis in response to Coriolis forces produced by rotation about the first axis, and the second mass is mounted for oscillation about the first axis in response to Coriolis forces produced by rotation about the second axis. In some disclosed embodiments, the rate sensor also includes a pair of accelerometer masses which are connected together for torsional movement of equal amplitude and opposite phase about axes parallel to the third axes in response to acceleration along the second axis and for torsional movement of equal amplitude and opposite phase about axes parallel to the second axis in response to acceleration along the third axes.

Abstract: A wireless data transmission system incorporates a process sensor providing an output for process monitoring data with a transmitter connected to the output of the sensor and transmitting the data in time gated intervals. A receiver receives the data from the transmitter and a determination is made if new data is received at a gated time interval. A processor connected to the receiver calculates process parameters based on the data received and a set of the calculated process parameters is stored. The processor estimates process parameters based on the stored set of calculated process parameters responsive to a signal from the determination that data packets have not been received at the gated interval. The process parameters front actual data, if present or from the estimates made by the processor are then output for process control. A counter responsive to the determination of lost data, provides an emergency stop signal upon reaching a predetermined number of counts.

Abstract: A spectroscope designed to utilize an adaptive optical element such as a micro mirror array (MMA) and two distinct light channels and detectors. The devices can provide for real-time and near real-time scaling and normalization of signals.

Abstract: Dithering mechanism and method for eliminating the effects of zero-rate bias in a rate sensor or gyroscope. Both continuously moving and indexing embodiments are disclosed. The mechanism includes a first part mounted in a fixed position centered about a dither axis perpendicular to the input axis of the gyroscope, a second part disposed coaxially of the first part and affixed to the sensing element of the gyroscope, and a plurality of piezoelectrically driven quartz flexure beams extending radially between the first and second parts for dithering the second part about the dither axis. In some embodiments, the dithering mechanism is formed separately from and affixed to the sensing element of the gyroscope, and in others it is formed integrally with the sensing element.

Abstract: Dithering mechanism and method for eliminating the effects of zero-rate bias in a rate sensor or gyroscope. Both continuously moving and indexing embodiments are disclosed. The mechanism includes a first part mounted in a fixed position centered about a dither axis perpendicular to the input axis of the gyroscope, a second part disposed coaxially of the first part and affixed to the sensing element of the gyroscope, and a plurality of piezoelectrically driven quartz flexure beams extending radially between the first and second parts for dithering the second part about the dither axis. In some embodiments, the dithering mechanism is formed separately from and affixed to the sensing element of the gyroscope, and in others it is formed integrally with the sensing element.

Abstract: A preformed sensor housing including a conduit having an inside; a plug disposed within the conduit; and a deposit covering a portion of the plug and a portion of the conduit. A method is also disclosed for creating a thin film diaphragm on a housing including the step of inserting a sacrificial element into the housing; depositing a diaphragm material onto the sacrificial element and the housing; and removing the sacrificial element.

Abstract: A pressure sensor system for measuring the pressure of a corrosive media includes a silicon plate forming a diaphragm and a glass plate or ring bonded to said silicon plate with an opening over the diaphragm. The diaphragm has resistive areas of different orientations to provide first resistive areas which have increased resistance with diaphragm deflection, and other areas which have decreased or little change in resistance with diaphragm deflection. The resistive areas may be formed by doping the silicon plate. The resistive areas have broad doped connectors extending outward to areas beyond the seal between the glass plate or ring, to wire bond areas on the silicon plate. Accordingly, the wire bond pads are not exposed to the corrosive media.