Abstract: The present invention relates to tools and system designs for chemical vapor deposition (CVD) systems and CVD synthesis used to deposit one or more thin film layers onto a flexible substrate or to grow nano-structured materials on large area flexible substrates and, more particularly, to scalable CVD coating and nanostructure manufacturing including CVD thin films and nano-structured materials such as nanotubes, nanowires and nanosheets.

Abstract: The use of deposition modules groups for each CVD deposition position including at least two deposition modules, together with a Motion Control System that controls and confines the motion of said deposition modules, enables a quick deposition module exchange at the deposition locations of On-Line or Off-Line CVD coating system. This results in a high volume large area CVD coating system that can increase the commercial viability of a given CVD system design through production throughput increases, production cost reductions, overall higher process flexibility and/or improved film quality.

Abstract: The use of deposition modules groups for each CVD deposition position including at least two deposition modules, together with a Motion Control System that controls and confines the motion of said deposition modules, enables a quick deposition module exchange at the deposition locations of On-Line or Off-Line CVD coating system. This results in a high volume large area CVD coating system that can increase the commercial viability of a given CVD system design through production throughput increases, production cost reductions, overall higher process flexibility and/or improved film quality.

Abstract: An oven compartment in an oven for subjecting items to a selected heating sequence having a compartment container with a transport opening therein to permit selectively entering such items adjacent to first plenum structure at a perforated surface to allow providing heating fluid thereon. The first plenum structure has a material mass and a specific heat such that a rate of change of temperature of that structure exceeds one degree Centigrade per second for a selected maximum temperature differential between heating fluid and any entered items positioned adjacent to the perforated surface at selected heating fluid pressures at that perforated surface. A method for heating such items with a heating fluid previously heated by a heater, to an extent determined by operating a heater control, directed onto such items is based on obtaining a control representation of a selected set of values for the heater control versus time based on a heating specification for a selected kind of item to be heated.