Patents Assigned to CXE Equipment Services, LLC
  • Apparatus and method for cleaning a bell jar in a barrel epitaxial reactor
    Patent number: 6738683
    Abstract: An epitaxial cleaning apparatus has a blower controller module and controller module code. The blower controller module is connected between a blower of an epitaxial deposition device having a reaction chamber, a blower and a plurality of plenum chambers for delivering cooling air from the blower to the reaction chamber, and a blower power source for controlling the speed of the blower.
    Type: Grant
    Filed: September 5, 2000
    Date of Patent: May 18, 2004
    Assignee: CXE Equipment Services, LLC
    Inventor: Frank J. Dunn