Patents Assigned to D.M.E.
  • Patent number: 4676992
    Abstract: A process for the deposition, on an optical substrate, of an antireflection coating capable of being engraved. In the process, metal is evaporated in a reactive atmosphere within the enclosure of an evaporator under vacuum and then deposited on the substrate. Previously cleaned substrates are disposed within the enclosure, which is then evacuated until a pressure of at most 1.5 .mu.Pa (10.sup.-8 torr) is obtained. Pure oxygen is injected at a regulated throughput in such a manner that the pressure is within the range of from 2 to 4 mPa, preferably 3 mPa (2.times.10.sup.-5 torr). A heated boat which is disposed within the enclosure and contains chromium is unmasked. The chromium evaporates at a temperature such that a coating of chromium oxide grows in thickness on the substrates at a rate of 0.1 to 0.5 nm per second, preferably 0.2 nm per second.
    Type: Grant
    Filed: September 17, 1985
    Date of Patent: June 30, 1987
    Assignee: D.M.E.
    Inventor: Michel Letellier