Abstract: An electrode for vapor deposition process may include: a body section mounted at a lower portion of the electrode and adapted to be electrically connected to an external electric source; and a head section integrally formed at an upper portion of the body section and coupled to a substrate, wherein the body section and the head section are formed through forging. According to the electrode, manufacturing cost is greatly lowered and electric conductivity and heat resistance are improved.
Abstract: An electrode for vapor deposition process may include: a body section mounted at a lower portion of the electrode and adapted to be electrically connected to an external electric source; and a head section integrally formed at an upper portion of the body section and coupled to a substrate, wherein the body section and the head section are formed through forging. According to the electrode, manufacturing cost is greatly lowered and electric conductivity and heat resistance are improved.