Patents Assigned to Daedalus Prime LLC
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Patent number: 11610995Abstract: Methods of forming a strained channel device utilizing dislocations disposed in source/drain structures are described. Those methods and structures may include forming a thin silicon germanium material in a source/drain opening of a device comprising silicon, wherein multiple dislocations are formed in the silicon germanium material. A source/drain material may be formed on the thin silicon germanium material, wherein the dislocations induce a tensile strain in a channel region of the device.Type: GrantFiled: September 9, 2022Date of Patent: March 21, 2023Assignee: Daedalus Prime LLCInventors: Michael Jackson, Anand Murthy, Glenn Glass, Saurabh Morarka, Chandra Mohapatra
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Patent number: 11581406Abstract: Techniques and methods related to strained NMOS and PMOS devices without relaxed substrates, systems incorporating such semiconductor devices, and methods therefor may include a semiconductor device that may have both n-type and p-type semiconductor bodies. Both types of semiconductor bodies may be formed from an initially strained semiconductor material such as silicon germanium. A silicon cladding layer may then be provided at least over or on the n-type semiconductor body. In one example, a lower portion of the semiconductor bodies is formed by a Si extension of the wafer or substrate. By one approach, an upper portion of the semiconductor bodies, formed of the strained SiGe, may be formed by blanket depositing the strained SiGe layer on the Si wafer, and then etching through the SiGe layer and into the Si wafer to form the semiconductor bodies or fins with the lower and upper portions.Type: GrantFiled: November 1, 2021Date of Patent: February 14, 2023Assignee: Daedalus Prime LLCInventors: Stephen M. Cea, Roza Kotlyar, Harold W. Kennel, Anand S. Murthy, Glenn A. Glass, Kelin J. Kuhn, Tahir Ghani
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Patent number: 11563081Abstract: Self-aligned gate edge and local interconnect structures and methods of fabricating self-aligned gate edge and local interconnect structures are described. In an example, a semiconductor structure includes a semiconductor fin disposed above a substrate and having a length in a first direction. A gate structure is disposed over the semiconductor fin, the gate structure having a first end opposite a second end in a second direction, orthogonal to the first direction. A pair of gate edge isolation structures is centered with the semiconductor fin. A first of the pair of gate edge isolation structures is disposed directly adjacent to the first end of the gate structure, and a second of the pair of gate edge isolation structures is disposed directly adjacent to the second end of the gate structure.Type: GrantFiled: August 24, 2020Date of Patent: January 24, 2023Assignee: Daedalus Prime LLCInventors: Milton Clair Webb, Mark Bohr, Tahir Ghani, Szuya S. Liao
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Patent number: 11507167Abstract: In an embodiment, a processor includes a core domain with a plurality of cores and a power controller having a first logic to receive a first request to increase an operating voltage of a first core of the core domain to a second voltage, to instruct a voltage regulator to increase the operating voltage to an interim voltage, and to thereafter instruct the voltage regulator to increase the operating voltage to the second voltage. Other embodiments are described and claimed.Type: GrantFiled: December 20, 2021Date of Patent: November 22, 2022Assignee: Daedalus Prime LLCInventors: Ryan D. Wells, Itai Feit, Doron Rajwan, Nadav Shulman, Zeev Offen, Inder M. Sodhi
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Patent number: 11508813Abstract: Techniques are disclosed for forming column IV transistor devices having source/drain regions with high concentrations of germanium, and exhibiting reduced parasitic resistance relative to conventional devices. In some example embodiments, the source/drain regions each includes a thin p-type silicon or germanium or SiGe deposition with the remainder of the source/drain material deposition being p-type germanium or a germanium alloy (e.g., germanium:tin or other suitable strain inducer, and having a germanium content of at least 80 atomic % and 20 atomic % or less other components). In some cases, evidence of strain relaxation may be observed in the germanium rich cap layer, including misfit dislocations and/or threading dislocations and/or twins. Numerous transistor configurations can be used, including both planar and non-planar transistor structures (e.g., FinFETs and nanowire transistors), as well as strained and unstrained channel structures.Type: GrantFiled: September 18, 2020Date of Patent: November 22, 2022Assignee: Daedalus Prime LLCInventors: Glenn A. Glass, Anand S. Murthy
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Patent number: 11482618Abstract: Methods of forming a strained channel device utilizing dislocations disposed in source/drain structures are described. Those methods and structures may include forming a thin silicon germanium material in a source/drain opening of a device comprising silicon, wherein multiple dislocations are formed in the silicon germanium material. A source/drain material may be formed on the thin silicon germanium material, wherein the dislocations induce a tensile strain in a channel region of the device.Type: GrantFiled: April 19, 2022Date of Patent: October 25, 2022Assignee: Daedalus Prime LLCInventors: Michael Jackson, Anand Murthy, Glenn Glass, Saurabh Morarka, Chandra Mohapatra
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Patent number: 11476344Abstract: Techniques are disclosed for forming transistor devices having reduced parasitic contact resistance relative to conventional devices. The techniques can be implemented, for example, using a standard contact stack such as a series of metals on, for example, silicon or silicon germanium (SiGe) source/drain regions. In accordance with one example such embodiment, an intermediate boron doped germanium layer is provided between the source/drain and contact metals to significantly reduce contact resistance. Numerous transistor configurations and suitable fabrication processes will be apparent in light of this disclosure, including both planar and non-planar transistor structures (e.g., FinFETs), as well as strained and unstrained channel structures. Graded buffering can be used to reduce misfit dislocation. The techniques are particularly well-suited for implementing p-type devices, but can be used for n-type devices if so desired.Type: GrantFiled: December 10, 2021Date of Patent: October 18, 2022Assignee: Daedalus Prime LLCInventors: Glenn A. Glass, Anand S. Murthy, Tahir Ghani