Abstract: An illuminance spectrum I of reflected light from a color print of an N-order color having an arbitrary dot percent d.sub.1-N is defined by a diffuse reflection coefficient Sb(d.sub.1-N,.lambda.) and a specular reflection coefficient Ss(d.sub.1-N,.lambda.). These reflection coefficients are obtained in the following manner. A plurality of reference colors are specified on each of N.times.2.sup.(N-1) sides that constitute an N-dimensional color space including the N-order target color. Each reflection coefficient is expressed by a linear combination of a plurality of reference reflection coefficients Sb and Ss, which are set in advance for the plurality of reference colors. The illuminance spectrum of reflected light is then determined according to these reflection coefficients Sb and Ss. Color data representing the colors of the print in a colorimetric system suitable for an output device are subsequently generated from the illuminance spectrum.

Abstract: A substrate processing apparatus is provided which requires a reduced installation space and allows for ready change of a process order. A substrate processing apparatus includes: a first transportation mechanism movable along a first transportation path in a predetermined transportation direction; a cassette load portion provided on one side of the transportation path; a plurality of unit portions arranged in a direction crossing the transportation direction on the other side of the first transportation path; and a second transportation mechanism disposed between each two adjacent unit portions and movable along a second transportation path in the transportation direction. The first transportation mechanism can perform a substrate transferring operation with respect to a cassette placed on the cassette load portion and a processing unit in a unit portion disposed in closest proximity to the first transportation path among the plurality of unit portions.

Abstract: Original image data are converted to device-independent image data expressed in a device-independent color space. The device-independent image data are re-converted to device-dependent image data expressed in a device-dependent color space used in an output device. Then, a specific sharpness enhancing process is carried out for the device-dependent image data, so as to generate output image data while the specific sharpness enhancing process is made equivalent to another sharpness enhancing process executed when a target output image is generated. This sharpness of the output image with a predetermined output device substantially agrees with that of the target output image. The method significantly improves the degree of matching in image reproduction between two different output images.

Abstract: A substrate treating apparatus adapted for treating a substrate with treating fluid therein, the substrate treating apparatus includes a processing bath; a baffle plate with a plurality of holes disposed therein for dividing the processing bath into an upper region and a lower region, the holes allowing communication of the treating liquid between the upper region and the lower region. The baffle plate is composed of a material exhibiting a property that the contact angle of a bubble generated in the treating liquid with respect to the baffle plate is smaller than a predetermined value.

Abstract: An original image is divided into a plurality of pixel blocks each consisting of a plurality of pixels. A density histogram represented by an electric signal is obtained for each pixel block. Respective pixel blocks are analyzed to find adjacent pixel blocks which are uniform and continuous in density. If the pixel blocks thus found are continuous in density with the reference pixel blocks located at the corner of the original image, the pixel blocks are regarded as those representing the background portion of the original image. The numbers of pixels in the density histogram is corrected for each background pixel block, and highlight and shadow points for determining a gradation curve is determined. The gradation curve is set in a signal-converter to convert an image signal representative of the original image.

Abstract: An illumination apparatus is disclosed which efficiently irradiates an irradiation surface without destroying the symmetry of an illuminance distribution at the irradiation surface. A light source is displaced from a center of curvature of a spherical mirror in a direction in a displacement plane which includes an axis of symmetry of the spherical mirror so as to form a light source image at a position off the light source. Due to this, a ray from the spherical mirror passes off the light source (i.e., the position of the light source image), and therefore, a reflection ray is not shielded, absorbed nor otherwise disturbed by the light source, which in turn prevents deterioration in the efficiency of utilization of light.

Abstract: The present invention allows image recording with plural light beams while eliminating alignment changes of light spots on the inner face of a drum. A light beam output unit 212 combines two circularly polarized light beams having opposite handedness to each other to produce a composite light beam CB. A polarization beam splitter 203 and mirrors 205 and 207 change the course of the light beam towards the inner face of a drum 120. A quarter-wave plate 202 and the polarization beam splitter 203 splits the composite light beam to two separate light beams as a function of the handedness of the circularly polarized light. The optical elements 202, 203, 205, and 207 are integrally rotated around the axis of the drum 120 by a main scanning motor 230, thus scanning a photosensitive material 110 held on the inner face of the drum 120 with the light beams.

Abstract: The present invention allows image recording with plural light beams while eliminating alignment changes of light spots on the inner face of a drum. A light beam output unit 212 combines two circularly polarized light beams having opposite handedness to each other to produce a composite light beam CB. A polarization beam splitter 203 and mirrors 205 and 207 change the course of the light beam towards the inner face of a drum 120. A quarter-wave plate 202 is included, and the polarization beam splitter 203 splits the composite light beam to two separate light beams as a function of the handedness of the circularly polarized light. The optical elements 202, 203, 205, and 207 are integrally rotated around the axis of the drum 120 by a main scanning motor 230, thus scanning a photosensitive material 110 held on the inner face of the drum 120 with the light beams.

Abstract: The purity of a liquid chemical agent is improved simultaneously with obtaining a homogeneous concentration of a specific chemical in the agent, thereby improving the quality of substrate processing steps. Pure water is supplied from a pure water supply (30) into a process tank (1) by opening an opening/closing valve (33) on a pure water supply system (7) and by closing an opening/closing valve (19) on a circulation system (5). After the process tank (1) is completely charged with pure water, the opening/closing valve (33) is closed while the opening/closing valve (19) is opened. This closes a pipe conduit (11) of the circulation system (5) and allows pure water in the process tank (1) to be circulated through the circulation system (5) by a pump (13). A first opening/closing valve (49) on a gas supply system (9) is subsequently opened to allow hydrogen chloride gas from a hydrogen chloride gas supply (40) to be fed into a mixing unit (17) of the circulation system (5).

Abstract: An image recording apparatus in which at least one light beam scans over an inner surface of a cylindrical member to record an image on a recording medium held on the inner surface. A light beam from light beam outputting means advances along a central axis of a cylindrical member and enters an optical head which includes deflecting means and an imaging optical system. The deflecting means and the imaging optical system rotate as one unit. The nodal point of the imaging optical system is located at or close to a point on the central axis which is nearest a beam irradiation position on the recording medium. Hence, displacement of the imaging position is prevented which makes it possible to record a high quality image, even if the optical head wobbles.

Abstract: The time and labor required for bias temperature (BT) treatment of a semi-conductor wafer is reduced by utilizing apparatus in which turning a switch 40 on connects a first d.c. power source 30 to apply a positive high voltage between a first wire 20 and a semiconductor wafer 100 while a second d.c. power source 32 applies a negative high voltage between a second wire 22 and the semiconductor wafer 100. This results in positive corona discharge between the first wire 20 and the semiconductor wafer 100 and negative corona discharge between the second wire 22 and the semiconductor wafer 100. After cessation of corona discharge, the semiconductor wafer 100 is heated to a high temperature for a predetermined time period with a heater 120 embedded in a stage 110 that supports the wafer that is being treated.

Abstract: A method of forming a thin film on the surface of a substrate using a roll coater without forming a projection of the thin film near the rear edge of the substrate includes the steps of: loading a substrate on a stage, moving the stage in a predetermined direction up to a certain position where at least a portion of the surface of the substrate comes into contact with the applicator roll while controlling the operation of the roll coating apparatus so that the amount of coating fluid transferred per unit area from the applicator roll to the substrate surface is a predetermined value, and further moving the stage in the predetermined direction to cancel the contact between the surface of the substrate and the applicator roll while controlling the operation of the roll coating apparatus so that the amount of coating fluid transferred per unit area from the applicator roll to the substrate surface is relatively reduced.

Abstract: The platemaking system is a system that produces a printing plate by using an exposure device 8 to print on original film that has imposition data consisting of multiple page data imposed on photosensitive film. The system is equipped with page data layout device 2 and exposure device 8. Page data layout device 2 indicates page layout data that contains positioning information and size information of each page data for the purpose of impositioning multiple page data on photosensitive film. Based on that page layout data, each page data is laid out at the imposition position of the photosensitive film, imposition data is created and the indicated page layout data is output to exposure device 8. Exposure device 8 receives the page layout data via network line NL and moves the original film to the corresponding position in accordance with the received page layout data after which the exposure process is carried out.

Abstract: Image data conversion processor converting a raster format of composed image data comprising line-work and picture data into a format of engraving pixel data for realizing a staggered-row screen of gravure printing cells, image density weighted for high-fidelity reproduction of tone value and line sharpness of an originally scanned image pattern. The dual-valued line-work pixels are in high concentration relative to the picture data pixels and are converted into multiple-valued line-work equivalent pixels in a picture-raster equivalent format. The multiple-valued line-work data and the picture data are assembled according to layout data operator controlled through a CRT to form the composed image data for conversion. A format converter in the processor maps the converted multiple-valued line-work equivalent pixels in the picture-raster equivalent format into gravure engraving pixels each corresponding to an engraved gravure cell of the stagger-format printing screen.

Abstract: There is provided a model where the illuminance of reflected light from the print is expressed with a linear combination of the illuminance of specular reflection light and that of internal reflection light. On the basis of the model, three methods are applicable to compute the colors of a print disposed in the three-dimensional space. In the first method, a specular reflection coefficient and an internal reflection coefficient, which are depending upon the wavelength, are interpolated by an angle of reflection .theta. and an angle of deviation .rho., and the illuminance spectrum of the reflected light is subsequently determined (step S2). Tristimulus values X, Y, and Z are then determined by integration of the illuminance spectrum according to the color matching functions (step S3). In the second method, the tristimulus values are determined for the specular reflection light, the internal reflection light, and the environmental light, respectively, and then interpolated by the reflection angle .theta.

Abstract: Reflectance measurement with two monochromatic light beams having different wavelengths is used to obtain curves respective representing the relationship between an insulation film thickness of a semiconductor wafer and the gap between a test electrode and a semiconductor wafer surface. The C-V curve measurement at a fixed gap determines a total capacity of the gap and the insulation film, and a straight line representing the relationship between the gap and the insulation film thickness is obtained from the total capacity. An intersection where the two curves and the straight line cross gives the true values of the gap and the insulation film thickness.

Abstract: The present invention provides a novel sensor preferably used for non-destructive measurement of the electrical characteristics of semiconductors. The sensor is easily manufactured and has a sufficiently high dielectric breakdown strength. The sensor includes an electrode mount 64 having a an electrode pattern 200 formed on a bottom surface 66a of a cone glass 66. The bottom surface 66a has a reflecting plane 66c for reflecting a laser beam, a test electrode 201, and three parallelism adjustor electrodes 111 through 113 formed around the reflecting plane 66c. The bottom surface 66a also has a guard ring 120 disposed between the test electrode 201 and the parallelism adjustor electrodes 111 through 113. An insulating film 68 covers a lower surface of the cone glass 66. Wiring formed on a inclined face 66b of the cone glass 66 is connected to external lead wires at the upper end of the wiring.

Abstract: A shadowing process in which offset values .DELTA.x and .DELTA.y indicating a gradient and a range of the shadowing effect are set as shadowing parameters. A target linework image area G is extracted from original image data on an n-th scanning line. On the next (n+1)-th line, a shadow pixel S1 is obtained for a start pixel GO of the target linework image area G according to a gradient k calculated by the offset values .DELTA.x and .DELTA.y. A shadow line segment on the (n+1)-th scanning line is determined based on the shadow pixel S1 and a length L of the target linework image area G. Shadow line segments are determined for (n+2)-th and (n+3)-th scanning lines in the same manner. The shadow line segments are combined to make a shadow area S.

Abstract: An illumination system for illuminating a surface includes a reflecting element having a finite focal length. A light source is located at a point, close to a focal point of the reflecting element, which is deviated from the principal axis of the reflecting element. Light from the light source is reflected by the reflecting element, whereby light with parallel rays is directed toward the surface. The surface is illuminated with symmetrical illuminance distribution with respect to the optical axis of the light.

Abstract: Deionized water is supplied into a rinsing bath from its bottom portion and overflows from the upper portion of the rinsing bath to form an upflow of deionized water in the rinsing bath. A substrate is rinsed by being immersed in the upflow of deionized water. After rinsing, the substrate is removed from deionized water, and at this tim the surroundings of the substrate are supplied with vapor of an organic solvent soluble in water which serves to lower surface tension of deionized water to the substrate. Thereafter, the substrate is dried in a sealed chamber that is evacuated and the surroundings of the substrate are reduced in pressure. As a result, during drying the substrate surface after rinsing same with deionized water, it is possible to reduce adhesion of particles to the substrate surface, and to dry the substrate surface rapidly without heating the substrate.