Abstract: A method of separating a lighter gas from heavier gases. A series of pumps is used. A gas to be separated out from a mixture of gases is introduced at an exhaust port of one of the pumps, with the lighter gas among them traveling upstream into a container.
Abstract: Vacuum gauge that detects and measures the partial pressure of a gas in a chamber, from pressures ranging from atmospheric to ultra-high vacuum. The gauge utilizes electromagnetic radiation, that is generated in the vacuum chamber by a electromagnetic radiation source. When the partial pressure of water vapor is being measured, the light source used emits low wavelength UV light in the 184 and 254 nanometer range. For other gases, different light sources emitting different UV wavelengths or different electromagnetic radiation are used. The electromagnetic radiation traverses the interior of the vacuum chamber, and impinges upon a detector. As this light passes through the interior space between the source and the detector, it strikes the particular, residual gas molecules that are being detected. These impacts scatter the light and/or absorb the light, so that there is less photonic energy striking the detector.
Abstract: A bulk getter-pump, consisting primarily of large beds of heated getter-material for use in pumping down in a high-vacuum environment. The pump is designed for applications now are served by turbo, cryo, diffusion, and ion pumps. The pump consists of a meshed cage filled with bulk getter-material pellets, which cage is housed in a housing coupled to a conduit of a vacuum chamber, so that the bulk getter-material is exposed to the interior of the vacuum chamber. In use, a roughing pump is first used to bring the chamber down to a pressure of about 10.sup.3 torr, and then the bulk getter-pump of the invention is operatively coupled to the chamber for sorbing gases, in order to reach a high vacuum.
Abstract: A bulk getter-pump, consisting primarily of large beds of heated getter-material for use in pumping down a vacuum chamber to a rough vacuum. The pump is designed for applications now are served by turbo, cryo, diffusion, and ion pumps. The pump consists of a meshed cage filled with bulk getter-material pellets, which cage is housed in a housing coupled to a conduit of a vacuum chamber, so that the bulk getter-material is exposed to the interior of the vacuum chamber. In use, a roughing pump is first used to bring the chamber down to a pressure of about 2 torr, and then the bulk getter-pump of the invention is operatively coupled to the chamber for sorbing gases, in order to reach a desired vacuum.