Abstract: In a device for the purification of exhaust gases, especially exhaust gases consisting of fluorine-containing compounds, bore holes (7,8) are made in a ring burner (5) for the separate supply of combustion gas and oxygen on a single hole circle around a central exhaust gas supply (9). The ring burner is arranged in a combustion chamber (1). The combustion chamber is closed up to an annular gap (20) between a cylindrical jacket (4) and a front face (16). Additional oxygen or additional air is introduced into the annular gap (20).

Abstract: Exhaust gases from CVD and plasma processes contain toxic pollutants, particularly fluorine-containing compounds, and must therefore be purified. In a device for the purification of exhaust gases, frequently one comprising a combustion chamber and a fuel gas flame, the pollutants are converted by means of a thermally activated, chemical reaction. A special design of the combustion chamber and the burner improves the economy of the exhaust gas purification process and, above all, reduces the amount of nitrogen oxide contained in the purified exhaust gas. To this end, it is ensured that a flame having a reducing effect over its entire cross section forms in the burner by separately supplying fuel gas and oxygen in an alternate manner into drill holes arranged on a single hole circle and by sealing the combustion chamber such that no additional air is supplied to the vicinity of the burner.

Abstract: Waste gas, in particular from plants for the chemical vapor-phase deposition and for the separation and etching by plasma processes, is purified from toxic agents by a method in which partial processes of the purification, such as thermal decomposition and oxidation, sorption of solid and gaseous reaction products, hydrolysis and cooling, are combined to act in a single reaction chamber. The reaction products of the waste gas burnt in a flame are led, directly in the combustion chamber, through a space filled with a finely dispersed liquid. This liquid forms a liquid film on all parts and inside walls of the reaction chamber. In a combustion chamber with a burner, the mentioned liquid distribution is obtained by a spraying device.Effective purification from toxic agents, and little corrosion of the components of the reaction chamber are achieved, any growth of solid reaction products in the combustion chamber being avoided.