Abstract: A gas scrubber and a waste gas treatment system with a gas scrubber for removing particles from a waste gas has a housing with a waste gas inlet and a waste gas outlet. The gas scrubber with a rotary atomizer is arranged vertically and centrally in the housing downstream from a wet scrubber. The housing may be a pipe or tube of a same or substantially a same diameter in both the wet scrubber section and the gas scrubber section. An outlet nozzle sprays a cleaning or scrubbing liquid onto a cup-shaped rotor with a tear-off edge of the rotary atomizer to create a turbulent mixture of waste gas particles and liquid. Liquid droplets with entrained particles are propelled from the rotor onto the outer wall of the housing and/or are captured by a droplet separator. The rotor is turned by a spindle motor aligned centrally in the housing.

Abstract: A gas scrubber and a waste gas treatment system with a gas scrubber for removing particles from a waste gas has a housing with a waste gas inlet and a waste gas outlet. A substantially circular plate member defining an axis of rotation is rotatably arranged in the housing. Waste gas fed into the housing via the waste gas inlet is directed toward approximately the center of the circular plate member. An outlet nozzle sprays a liquid, especially a cleaning liquid or a scrubbing liquid, onto the circular plate member, in order to obtain a mixture of waste gas and liquid in front of the plate member. A combination of inner and outer rotor arrays, and inner and outer stator arrays are arranged alternatingly and concentrically relative to each other, and separated from the circular plate member, and rotate about the axis of rotation. A rotary atomizer for atomizing the mixture of waste gas and liquid may be arranged on the circular plate member. Particles from the waste gas stream are transferred into the liquid.

Abstract: The invention relates to a burner as well as to a waste gas treatment device for generating a flame for the combustion of process gas, especially of contaminants, in a combustion chamber, in each case having feed lines for a fuel gas and for an oxidizing agent so that they flow into a pre-mixing chamber, and having an ignition device for igniting the gas mixture contained in the pre-mixing chamber. According to the invention, a sensor for detecting and/or monitoring the flame is provided on the burner, especially at one end of the burner situated opposite from the pre-mixing chamber.

Abstract: A device, such as a wet scrubber for cleaning a stream of gas by removing gaseous, liquid and solid impurities, has a gas inlet and a gas outlet. At the gas inlet there is a first structured packing. A spray-scrubber area with atomizing nozzles is provided above the first structured packing. A first demister is provided for separating larger drops above the spray-scrubber area. A woven fabric is above the first demister, and spray nozzles are arranged around this woven fabric to spray washing liquid in the direction of the gas stream onto the surface of the woven fabric. A final demister is located above the woven fabric and has a demister rinsing apparatus. The device may be used to dispose of industrial waste gases encountered in the semiconductor industry, particularly for the disposal of waste gases stemming from CVD processes in microelectronics production.

Abstract: The invention relates to a method for the thermal disposal of pollutants in industrial gases, wherein, in order to generate a flame for burning the pollutants, a fuel gas and oxygen are fed into a combustion chamber (19) of a burner (1), where they are then ignited, wherein a diluent gas is fed in in order to reduce the calorific value of the gas mixture relative to the fuel gas, while the throughput of the diluent gas is regulated as a function of the composition of the industrial gas in order to adapt the gas mixture consisting of diluent gas and fuel gas. The invention also relates to a burner (1) for generating a flame (2) in a combustion chamber (19) for burning pollutants in an industrial gas, and to a waste-gas treatment device having at least one burner (1) arranged in a combustion chamber (19).

Abstract: An apparatus and method for wet cleaning a gas stream has a housing with a gas inlet and a gas outlet, wherein, in the housing, there is at least a first washing segment that serves to clean the gas stream with a washing liquid and that is arranged in the flow path of the gas stream. Inside the housing of the apparatus, there is at least one fan that regulates air pressure along the flow path of the gas stream. A bypass channel for bypassing the flow path through the at least one washing segment as well as a regulator that is arranged in the bypass and that serves to discharge the gas stream being conveyed via the bypass channel are arranged inside the housing.

Abstract: A gas scrubber and a waste gas treatment system with a gas scrubber for removing particles from a waste gas has a housing with a waste gas inlet and a waste gas outlet. A substantially circular plate member defining an axis of rotation is rotatably arranged in the housing. Waste gas fed into the housing via the waste gas inlet is directed toward approximately the center of the circular plate member. An outlet nozzle sprays a liquid, especially a cleaning liquid or a scrubbing liquid, onto the circular plate member, in order to obtain a mixture of waste gas and liquid in front of the plate member. A combination of inner and outer rotor arrays, and inner and outer stator arrays are arranged alternatingly and concentrically relative to each other, and separated from the circular plate member, and rotate about the axis of rotation. A rotary atomizer for atomizing the mixture of waste gas and liquid may be arranged on the circular plate member. Particles from the waste gas stream are transferred into the liquid.

Abstract: An electrostatic precipitator (1) to precipitate one or more materials (9) out of an exhaust gas flow (5) has a spray electrode (2) having an active part (14) for generating a corona discharge (6) and a flushing liquid supply (21), by means of which flushing liquid (10) is supplied into the precipitator (1) for removing deposits (11), made of the material(s) (9) to be separated, that settle on the spray electrode (2). The precipitator (1) uses less cleaning liquid and the cleaning is carried out more reliably. For this purpose, a flushing device (8) directs the flushing liquid (10) across a head region (12) of the spray electrode (2) onto the active part (14) of the spray electrode (2) as a flushing stream (22).

Abstract: The invention relates to a burner as well as to a waste gas treatment device for generating a flame for the combustion of process gas, especially of contaminants, in a combustion chamber, in each case having feed lines for a fuel gas and for an oxidizing agent so that they flow into a pre-mixing chamber, and having an ignition device for igniting the gas mixture contained in the pre-mixing chamber. According to the invention, a sensor for detecting and/or monitoring the flame is provided on the burner, especially at one end of the burner situated opposite from the pre-mixing chamber.

Abstract: An apparatus and method for wet cleaning a gas stream has a housing with a gas inlet and a gas outlet, wherein, in the housing, there is at least a first washing segment that serves to clean the gas stream with a washing liquid and that is arranged in the flow path of the gas stream. Inside the housing of the apparatus, there is at least one fan that regulates air pressure along the flow path of the gas stream. A bypass channel for bypassing the flow path through the at least one washing segment as well as a regulator that is arranged in the bypass and that serves to discharge the gas stream being conveyed via the bypass channel are arranged inside the housing.

Abstract: An electrostatic precipitator (1) to precipitate one or more materials (9) out of an exhaust gas flow (5) has a spray electrode (2) having an active part (14) for generating a corona discharge (6) and a flushing liquid supply (21), by means of which flushing liquid (10) is supplied into the precipitator (1) for removing deposits (11), made of the material(s) (9) to be separated, that settle on the spray electrode (2). The precipitator (1) uses less cleaning liquid and the cleaning is carried out more reliably. For this purpose, a flushing device (8) directs the flushing liquid (10) across a head region (12) of the spray electrode (2) onto the active part (14) of the spray electrode (2) as a flushing stream (22).