Abstract: A temperature control apparatus including a temperature control head kept in contact with an electronic device as a testing object thermally, an electric heater attached to the temperature control head, a refrigerant passage formed within the temperature control head so as to run through inside thereof, a compressor which compresses refrigerant coming out of the temperature control head, a temperature sensor which detects a temperature of refrigerant on an outlet side of the compressor, a condenser which condenses refrigerant coming out of the compressor, a returning portion which returns refrigerant condensed by the condenser to the temperature control head, and a control portion which bypasses the condensed refrigerant to the intake side of the compressor by a predetermined quantity corresponding to an output of the temperature sensor.

Abstract: A temperature control apparatus includes a socket holder which is provided on a tester head and holds a socket to mount an IC chip. A socket cover has an opening to pass the end of a handler pusher for holding the IC chip on testing. The socket cover forms a closed space around the IC chip in a state that the IC chip is pressed to the socket by the pusher. A gas supplying unit externally supplies the closed space with gas of a predetermined temperature.

Abstract: A temperature control apparatus including a temperature control head kept in contact with an electronic device as a testing object thermally, an electric heater attached to the temperature control head, a refrigerant passage formed within the temperature control head so as to run through inside thereof, a compressor which compresses refrigerant coming out of the temperature control head, a temperature sensor which detects a temperature of refrigerant on an outlet side of the compressor, a condenser which condenses refrigerant coming out of the compressor, a returning portion which returns refrigerant condensed by the condenser to the temperature control head, and a control portion which bypasses the condensed refrigerant to the intake side of the compressor by a predetermined quantity corresponding to an output of the temperature sensor.

Abstract: A temperature control apparatus including a temperature control head kept in contact with an electronic device as a testing object thermally, an electric heater attached to the temperature control head, a refrigerant passage formed within the temperature control head so as to run through inside thereof, a compressor which compresses refrigerant coming out of the temperature control head, a temperature sensor which detects a temperature of refrigerant on an outlet side of the compressor, a condenser which condenses refrigerant coming out of the compressor, a returning portion which returns refrigerant condensed by the condenser to the temperature control head, and a control portion which bypasses the condensed refrigerant to the intake side of the compressor by a predetermined quantity corresponding to an output of the temperature sensor.

Abstract: A temperature control apparatus including a temperature control head kept in contact with an electronic device as a testing object thermally, an electric heater attached to the temperature control head, a refrigerant passage formed within the temperature control head so as to run through inside thereof, a compressor which compresses refrigerant coming out of the temperature control head, a temperature sensor which detects a temperature of refrigerant on an outlet side of the compressor, a condenser which condenses refrigerant coming out of the compressor, a returning portion which returns refrigerant condensed by the condenser to the temperature control head, and a control portion which bypasses the condensed refrigerant to the intake side of the compressor by a predetermined quantity corresponding to an output of the temperature sensor.

Abstract: A pusher of an IC chip handler has a pusher frame which is attached to a pusher main body to be driven by the IC chip handler and a plurality of pusher heads attached to the pusher frame. Each of the pusher heads comprises a holder which is held by the pusher frame. At least one spring post is freely protruded outward from the inside of the holder, and a compression spring has one end arranged under pressure to a spring receiving portion of the spring post. A spring push plate arranges the compression spring to the spring receiving portion of the spring post under pressure, and an adjusting member adjusts a compression force of the compression spring. A device holding unit is attached to an end of the spring post protruded outside of the holder.

Abstract: A pusher of an IC chip handler has a pusher frame which is attached to a pusher main body to be driven by the IC chip handler and a plurality of pusher heads attached to the pusher frame. Each of the pusher heads comprises a holder which is held by the pusher frame. At least one spring post is freely protruded outward from the inside of the holder, and a compression spring has one end arranged under pressure to a spring receiving portion of the spring post. A spring push plate arranges the compression spring to the spring receiving portion of the spring post under pressure, and an adjusting member adjusts a compression force of the compression spring. A device holding unit is attached to an end of the spring post protruded outside of the holder.

Abstract: A temperature control apparatus comprising a socket holder which is provided on a tester head and holds a socket to mount an IC chip, a socket cover which has an opening to pass the end of a handler pusher for holding the IC chip on testing, and forms a closed space around the IC chip in a state that the IC chip is pressed to the socket by the pusher, and a gas supplying unit which externally supplies the closed space with gas of a predetermined temperature.