Abstract: The present invention relates to an apparatus for evaporation comprising a vacuum chamber, a substrate stage defining a substrate plane and at least one effusion cell, the effusion cell comprising a crucible having a volume, wherein said effusion cell, crucible and substrate stage are arranged inside the vacuum chamber. The crucible comprises a first end, a second end, at least one side wall and an aperture. In a typical apparatus according to the invention the aperture is situated in the first wall or in a side wall closer to the first end than the second end, the second end arranged closer to the substrate plane than the first end. The invention also relates to a crucible for evaporation, having a volume, comprising a first end, a second end, at least one side wall and an aperture. The invention further relates to a method of growing a film on a substrate.

Abstract: The phosphorus effusion cell arrangement according to the present invention comprises a first vacuum container for red phosphorus, a second vacuum container for white phosphorus, said first and second vacuum containers being interconnected, means for providing vacuum, a thermal cracker in connection with said second vacuum container, as well as a control valve between said second vacuum container and said thermal cracker. The present invention is characterized in that it further comprises a separating valve between said first and second vacuum containers, provided that there is no direct connection between said first vacuum container and said thermal cracker. The invention also relates to a method for producing molecular phosphorus P2.

Abstract: The present invention relates to an apparatus for evaporation comprising a vacuum chamber, a substrate stage defining a substrate plane and at least one effusion cell, the effusion cell comprising a crucible having a volume, wherein said effusion cell, crucible and substrate stage are arranged inside the vacuum chamber. The crucible comprises a first end, a second end, at least one side wall and an aperture. In a typical apparatus according to the invention the aperture is situated in the first wall or in a side wall closer to the first end than the second end, the second end arranged closer to the substrate plane than the first end. The invention also relates to a crucible for evaporation, having a volume, comprising a first end, a second end, at least one side wall and an aperture. The invention further relates to a method of growing a film on a substrate.

Abstract: A method and apparatus in Molecular Beam Epitaxy (MBE) in order to grow thin films. The substrate is attached to the rotatable manipulator and its normal will be aligned parallel to the rotation axis in vacuum for providing a real time information on the growth parameters by ellipsometry. The apparatus includes a rotatable manipulator head where the substrate is attached to, and aligning elements to align the substrate normal sufficiently parallel to the rotation axis of the manipulator in vacuum.