Abstract: A method for making chlorinated silazanes. The method comprises contacting: (a) a disilazane; (b) a chlorosilane; and (c) a catalyst which is a zinc salt of: (i) a sulfonic acid or (ii) a sulfonic acid imide.
Type:
Grant
Filed:
November 29, 2017
Date of Patent:
May 31, 2022
Assignee:
DDP Specialty Electronic Materials US 9, Inc.