Abstract: A MEMS driver includes a digital control block receiving an external digital control word and generating digital control signals for use in controlling a reference current source. The reference current source generates a reference current to a high voltage output stage in response to the digital control signals. The high voltage output stage generates an output current to an integrator in response to the reference current. The integrator provides an output voltage to a drive electrode that electrostically controls the position of the MEMS structure.