Abstract: A radiation detector for position-resolved detection of radiation and a method of manufacturing. The radiation detector comprises at least one sensor tile with sensor material sensitive to the radiation defining a horizontal plane; a set of pixels of electrically conducting material in contact with the sensor material; at least one ASIC with input contacts in electrical connection with the pixels, wherein at least one input contact is horizontally offset relative to a corresponding pixel; and a redistribution layer between the at least one sensor tile and the at least one ASIC, the redistribution layer comprising conductor tracks electrically connecting the input contacts with the corresponding pixels. At least one of the conductor tracks crosses at least one crossed pixel different from the corresponding pixel. At least one crossed pixel has a void of the electrically conducting material corresponding to at least a portion of projections of the conductor tracks.

Abstract: An electron detector comprises a sensor module comprising a sensor for detecting electrons, and an electronics module comprising circuitry for processing signals received from the sensor module. Wiring is provided for electrically connecting the sensor module to the electronics module. An adaptor is arranged between the sensor module and the electronics module. The adaptor comprises a passage for the wiring, and shielding elements for shielding from radiation.

Abstract: A radiation detector for position-resolved detection of radiation comprises at least one sensor tile with a front side facing incident radiation, and a back side opposite the front side. The sensor tile comprises a sensor material sensitive to the radiation. A front electrode is arranged on the front side of the sensor tile. A braking layer is arranged on the front electrode and at least partly covers the front electrode, for decelerating electrons in the incident radiation. A set of contacts of electrically conducting material is arranged on the back side of the sensor tile and in contact with the sensor material, thereby defining sensor pixels. At least one ASIC comprises a set of readout circuits in electrical connection with the contacts, each readout circuit being configured to process a signal received from the sensor pixel the readout circuit is electrically connected to.