Patents Assigned to Delfmems
  • Patent number: 7834722
    Abstract: The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/FIG. 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3), which is bendable under the action of the actuation means (7), and which can freely slide relatively to the support means (3) during its bending movement.
    Type: Grant
    Filed: March 7, 2006
    Date of Patent: November 16, 2010
    Assignee: Delfmems
    Inventor: Olivier Millet