Abstract: An inner case affixes single cells and has multiple individual storage chambers. A fluid drive device draws a fluid after passing through the individual storage chambers to form a circulation flow. A beam supports the inner case from the lower side. The inner case has an inlet port into which the fluid flows and an outlet port through which the fluid flows out. A downstream chamber, which communicates with the outlet port, is formed in an interior of the inner case between the individual storage chambers that face each other at a distance. The downstream side chamber is connected to a lower wall side passage partitioned by the beams. The fluid flowing out from the outlet port to the downstream side chamber passes through the lower wall side passage and is drawn into an intake port of the fluid drive device.

Abstract: An electrical capacitance pressure sensor has a lower electrode, a movable electrode, and an upper electrode. A first cavity portion is formed between the lower electrode and the movable electrode. A second cavity portion is formed between the upper electrode and the movable electrode. The substrate has an opening portion that penetrates the substrate from the first surface to the second surface thereof. The lower electrode has at least one first window portion that penetrates the lower electrode from the side of the substrate to the side of the first cavity portion and communicates the cavity portion to the opening portion of the substrate. The upper electrode has at least one second window portion that penetrates the upper electrode from the side of the cavity portion to the outside thereof to communicate the cavity portion with the outside.